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1. (WO2001031978) CERAMIC HEATER

Pub. No.:    WO/2001/031978    International Application No.:    PCT/JP2000/005462
Publication Date: Fri May 04 01:59:59 CEST 2001 International Filing Date: Tue Aug 15 01:59:59 CEST 2000
IPC: H01L 21/00
H05B 3/14
H05B 3/26
Applicants: IBIDEN CO., LTD.

ITO, Yasutaka

Inventors: ITO, Yasutaka

The invention provides a ceramic heater superior in the uniformity of temperature using a heater substrate made of high-heat-conductivity ceramic. A discoid ceramic heater (100) has circular heater patterns (2) of substantially equal width formed on or in the surface of a ceramic substrate (1).