Search International and National Patent Collections

1. (WO2001031700) WAFER HOLDER AND EPITAXIAL GROWTH DEVICE

Pub. No.:    WO/2001/031700    International Application No.:    PCT/JP2000/007558
Publication Date: Fri May 04 01:59:59 CEST 2001 International Filing Date: Sat Oct 28 01:59:59 CEST 2000
IPC: C23C 16/458
C30B 25/12
C30B 31/14
H01L 21/687
Applicants: APPLIED MATERIALS INC.

TAKAGI, Youji

HIRAKAWA, Masahiko

Inventors: TAKAGI, Youji

HIRAKAWA, Masahiko

Title: WAFER HOLDER AND EPITAXIAL GROWTH DEVICE
Abstract:
A wafer holder includes a susceptor made of SiC for holding a single wafer horizontally. A recessed holding part for receiving a wafer is formed in an upper part of the susceptor. Five through holes are provided in the susceptor around the holding part. A support member made of SiC is inserted into each of the through holes. The support member has its top, whose inner part (toward the holding part) provided with a cut to be engaged with the edge of the wafer. The support members are raised with respect to the susceptor by a lift mechanism. When a wafer is placed on the susceptor, the wafer edge is engaged with the cuts of the support members so that it is prevented from deviating horizontally.