Some content of this application is unavailable at the moment.
If this situation persist, please contact us atFeedback&Contact
1. (WO2001031287) METHOD AND APPARATUS FOR MOLECULAR ANALYSIS OF BURIED LAYERS
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2001/031287 International Application No.: PCT/US2000/027574
Publication Date: 03.05.2001 International Filing Date: 05.10.2000
Chapter 2 Demand Filed: 06.04.2001
IPC:
G01N 23/227 (2006.01) ,G01N 21/35 (2006.01) ,G01N 27/62 (2006.01) ,G01Q 30/02 (2010.01) ,G01Q 60/24 (2010.01) ,G01Q 80/00 (2010.01) ,G21K 7/00 (2006.01)
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
23
Investigating or analysing materials by the use of wave or particle radiation not covered by group G01N21/ or G01N22/159
22
by measuring secondary emission
227
by measuring photoelectric effect, e.g. Auger electrons
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
17
Systems in which incident light is modified in accordance with the properties of the material investigated
25
Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
31
Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
35
using infra-red light
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
27
Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
62
by investigating the ionisation of gases; by investigating electric discharges, e.g. emission of cathode
G PHYSICS
01
MEASURING; TESTING
Q
SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY [SPM]
30
Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
02
Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
G PHYSICS
01
MEASURING; TESTING
Q
SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY [SPM]
60
Particular types of SPM [Scanning-Probe Microscopy] or apparatus therefor; Essential components thereof
24
AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
G PHYSICS
01
MEASURING; TESTING
Q
SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY [SPM]
80
Applications, other than SPM, of scanning-probe techniques
G PHYSICS
21
NUCLEAR PHYSICS; NUCLEAR ENGINEERING
K
TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
7
Gamma ray or X-ray microscopes
Applicants:
3M INNOVATIVE PROPERTIES COMPANY [US/US]; 3M Center Post Office Box 33427 Saint Paul, MN 55133-3427, US
Inventors:
PACHUTA, Steven, J.; US
JONES, Vivian, W.; US
Agent:
DAHL, Philip, Y. ; Office of Intellectual Property Counsel Post Office Box 33427 Saint Paul, MN 55133-3427, US
Vossius & Partner; Patentanwalte P. O. Box 86 07 67 81634 München, DE
Priority Data:
09/425,58722.10.1999US
Title (EN) METHOD AND APPARATUS FOR MOLECULAR ANALYSIS OF BURIED LAYERS
(FR) PROCEDE ET APPAREIL D'ANALYSE MOLECULAIRE DE COUCHES ENTERREES
Abstract:
(EN) A method and apparatus are provided for the analysis of buried layers of an analyte material by: a) removing surface layers of said analyte material with an atomic force microscopy (AFM) stylus to expose a buried layer; and b) analyzing a buried layer, preferably for molecular structure. An apparatus is provided which encompasses both AFM and one or more additional surface analytical apparati within a controlled atmosphere under coordinated computer control.
(FR) L'invention concerne un procédé et un appareil d'analyse de couches enterrées d'une matière à analyser: a) par enlèvement des couches superficielles de ladite matière à analyser au moyen d'une pointe de microscope à forces atomiques (AFM) afin d'exposer une couche enterrée; et b) par analyse d'une couche enterrée, de préférence, de sa structure moléculaire. L'invention concerne également un appareil qui comprend à la fois l'AFM et un ou plusieurs appareils supplémentaires d'analyse de surface dans une atmosphère commandée par ordinateur, de façon coordonnée.
front page image
Designated States: JP
European Patent Office (EPO) (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE)
Publication Language: English (EN)
Filing Language: English (EN)