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1. (WO2001026436) METHOD AND DEVICE FOR LASER DRILLING ORGANIC MATERIALS

Pub. No.:    WO/2001/026436    International Application No.:    PCT/DE2000/003426
Publication Date: Apr 12, 2001 International Filing Date: Sep 29, 2000
IPC: B23K 26/18
B23K 26/402
H01S 3/00
H05K 3/00
B23K 101/42
Applicants: SIEMENS AKTIENGESELLSCHAFT
DE STEUR, Hubert
HEERMAN, Marcel
VAN PUYMBROECK, Jozef
Inventors: DE STEUR, Hubert
HEERMAN, Marcel
VAN PUYMBROECK, Jozef
Title: METHOD AND DEVICE FOR LASER DRILLING ORGANIC MATERIALS
Abstract:
In order to laser drill organic materials, especially for inserting pocket holes in dielectric layers, a frequency-doubled Nd vanadate laser is used that has the following parameters: pulse duration < 40 ns; pulse frequency ≥ 20 kHz, and wavelength = 532 nm.