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Machine translation
1. (WO2001023873) X-RAY MICROANALYZER FOR THIN FILMS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2001/023873    International Application No.:    PCT/IL2000/000575
Publication Date: 05.04.2001 International Filing Date: 17.09.2000
Chapter 2 Demand Filed:    27.04.2001    
IPC:
G01N 23/20 (2006.01)
Applicants: JORDAN VALLEY APPLIED RADIATION LTD. [IL/IL]; P.O. Box 103, 10550 Migdal Haemek (IL) (For All Designated States Except US).
VU, Long [US/US]; (US) (For US Only).
YOKHIN, Boris [IL/IL]; (IL) (For US Only).
MAZOR, Isaac [IL/IL]; (IL) (For US Only).
GVIRTZMAN, Amos [IL/IL]; (IL) (For US Only)
Inventors: VU, Long; (US).
YOKHIN, Boris; (IL).
MAZOR, Isaac; (IL).
GVIRTZMAN, Amos; (IL)
Agent: COLB, Sanford, T.; Sanford T. Colb & Co., P.O. Box 2273, 76122 Rehovot (IL).
ZIELINSKI, Walt Thomas; DARBY & DARBY P.C., 805 Third Avenue, New York, New York 10022-7513 (US)
Priority Data:
09/408,894 29.09.1999 US
Title (EN) X-RAY MICROANALYZER FOR THIN FILMS
(FR) MICROANALYSE AUX RAYONS X DE FILMS MINCES
Abstract: front page image
(EN)Apparatus (20) for X-ray microanalysis of a sample (22) includes an X-ray source (24), which irradiates a spot (46) having a dimension less than 500 $g(m)m on a surface of the sample. A first X-ray detector (30) captures fluorescent X-rays emitted from the sample, responsive to the irradiation, at a high angle relative to the surface of the sample. A second X-ray detector (34) captures X-rays from the spot at a grazing angle relative to the surface of the sample. Processing circuitry (36) receives respective signals from the first and second X-ray detectors responsive to the X-rays captured thereby, and analyzes the signals in combination to determine a property of a surface layer of the sample within the area of the spot.
(FR)L'invention porte sur un appareil (20) de microanalyse aux rayons X d'un échantillon comprenant une source (24) projetant un spot (46) de moins de 500 $g(m)m sur la surface de l'échantillon. Un premier détecteur (30) de rayons X capture les rayons X émis par l'échantillon irradié sous un angle élevé par rapport à la surface de l'échantillon. Un deuxième détecteur (34) de rayons X capture les rayons X émis par l'échantillon irradié sous un angle rasant par rapport à la surface de l'échantillon. Un circuit de traitement (36) reçoit les signaux émis par les deux détecteurs et procède à leur analyse combinée pour déterminer une propriété de la surface de l'échantillon intérieure au spot.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, BZ, CA, CH, CN, CR, CU, CZ, DE, DK, DM, DZ, EE, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NO, NZ, PL, PT, RO, RU, SD, SE, SG, SI, SK, SL, TJ, TM, TR, TT, TZ, UA, UG, US, UZ, VN, YU, ZA, ZW.
African Regional Intellectual Property Organization (GH, GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)