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1. (WO2001006547) A THIN FILM RESISTOR DEVICE AND A METHOD OF MANUFACTURE THEREFOR

Pub. No.:    WO/2001/006547    International Application No.:    PCT/US2000/019010
Publication Date: Fri Jan 26 00:59:59 CET 2001 International Filing Date: Fri Jul 14 01:59:59 CEST 2000
IPC: H01C 7/00
H01C 17/075
H01C 17/08
H01L 21/02
H01L 23/522
H01L 23/532
H01L 27/08
Applicants: LUCENT TECHNOLOGIES INC.
Inventors: HUTTEMANN, Robert, D.
TEREFENKO, George, J.
Title: A THIN FILM RESISTOR DEVICE AND A METHOD OF MANUFACTURE THEREFOR
Abstract:
The present invention provides a thin film resistor and method of manufacture therefor. The thin film resistor comprises a resistive layer located on a first dielectric layer, first and second contact pads located on the resistive layer, and a second dielectric layer located over the resistive layer and the first and second contact pads. In an illustrative embodiment, the thin film resistor further includes a first interconnect that contacts the first contact pad and a second interconnect that contacts the second contact pad.