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Machine translation
1. (WO2001005487) AUTO-SWITCHING GAS DELIVERY SYSTEM UTILIZING SUB-ATMOSPHERIC PRESSURE GAS SUPPLY VESSELS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2001/005487    International Application No.:    PCT/US2000/019458
Publication Date: 25.01.2001 International Filing Date: 14.07.2000
Chapter 2 Demand Filed:    13.02.2001    
IPC:
B01D 53/04 (2006.01), F17C 9/00 (2006.01), F17C 13/02 (2006.01), F17C 13/04 (2006.01)
Applicants: ADVANCED TECHNOLOGY MATERIALS, INC. [US/US]; 7 Commerce Drive, Danbury, CT 06810 (US)
Inventors: DIETZ, James; (US)
Agent: ZITZMANN, Oliver, A., M.; Advanced Technology Materials, Inc., 7 Commerce Drive, Danbury, CT 06810 (US)
Priority Data:
09/356,020 16.07.1999 US
Title (EN) AUTO-SWITCHING GAS DELIVERY SYSTEM UTILIZING SUB-ATMOSPHERIC PRESSURE GAS SUPPLY VESSELS
(FR) SYSTEME A AUTO-COMMUTATION DE DISTRIBUTION DE GAZ UTILISANT DES VAISSEAUX DE DISTRIBUTION DE GAZ SOUS PRESSION NEGATIVE
Abstract: front page image
(EN)An auto-switching sub-atmospheric pressure gas delivery system (10), for dispensing gas to a gas-consuming process unit (38), e.g., a semi-conductor manufacturing tool (38).
(FR)L'invention concerne un système à auto-commutation de distribution de gaz (10) sous pression négative destiné à distribuer du gaz à unité de traitement consommatrice de gaz (38), par exemple, un outil de fabrication de semi-conducteurs.
Designated States: AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, CA, CH, CN, CU, CZ, DE, DK, EE, ES, FI, GB, GE, GH, HU, IL, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MD, MG, MK, MN, MW, MX, NO, NZ, PL, PT, RO, RU, SD, SE, SG, SI, SK, SL, TJ, TM, TR, TT, UA, UG, UZ, VN, YU, ZW.
African Regional Intellectual Property Organization (GH, GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)