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1. (WO2001004939) SEMICONDUCTOR FILM, LIQUID-CRYSTAL DISPLAY USING SEMICONDUCTOR FILM, AND METHOD OF MANUFACTURE THEREOF

Pub. No.:    WO/2001/004939    International Application No.:    PCT/JP2000/004608
Publication Date: Fri Jan 19 00:59:59 CET 2001 International Filing Date: Wed Jul 12 01:59:59 CEST 2000
IPC: G02F 1/1362
H01L 21/20
H01L 21/336
H01L 21/84
H01L 27/12
H01L 29/786
Applicants: HITACHI, LTD.

SHINAGAWA, Youmei

MIMURA, Akio

KAWACHI, Genshiro

SATOH, Takeshi

Inventors: SHINAGAWA, Youmei

MIMURA, Akio

KAWACHI, Genshiro

SATOH, Takeshi

Title: SEMICONDUCTOR FILM, LIQUID-CRYSTAL DISPLAY USING SEMICONDUCTOR FILM, AND METHOD OF MANUFACTURE THEREOF
Abstract:
A method of semiconductor manufacture includes the steps of forming an insulating layer on a glass substrate, forming a first semiconductor layer, crystallizing the first semiconductor layer using laser whose energy is gradually increased, forming a second semiconductor layer thinner than the first semiconductor layer, and crystallizing the second semiconductor layer using laser whose energy is gradually increased. All the steps are carried out sequentially in a space isolated from the atmosphere, resulting in a crystalline semiconductor of high quality having a smooth surface and a large grain size.