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1. (WO2001004715) SYSTEM AND METHOD OF OPERATION OF A DIGITAL MASS FLOW CONTROLLER

Pub. No.:    WO/2001/004715    International Application No.:    PCT/US2000/017062
Publication Date: Fri Jan 19 00:59:59 CET 2001 International Filing Date: Thu Jun 22 01:59:59 CEST 2000
IPC: G05D 7/06
Applicants: MILLIPORE CORPORATION
Inventors: TINSLEY, Kenneth, E.
TARIQ, Faisal
Title: SYSTEM AND METHOD OF OPERATION OF A DIGITAL MASS FLOW CONTROLLER
Abstract:
The mass flow controller of the present invention includes a sensor (12). This sensor is used to detect a mass flow within a gas line. Additionally, this sensor provides an output (15) to an electronic control system (16) coupled to the sensor. The electronic control system will determine an expected mass flow based on the output of the sensor. The electronic control system will adjust a control valve (22) with a control signal to regulate a first gas flow through the control valve.