Search International and National Patent Collections

1. (WO2001004640) MICROMECHANICAL ROTATION ACCELERATION SENSOR

Pub. No.:    WO/2001/004640    International Application No.:    PCT/DE2000/001290
Publication Date: Fri Jan 19 00:59:59 CET 2001 International Filing Date: Sun Apr 23 01:59:59 CEST 2000
IPC: G01P 15/08
G01P 15/09
Applicants: ROBERT BOSCH GMBH
HOPF, Gerald
Inventors: HOPF, Gerald
Title: MICROMECHANICAL ROTATION ACCELERATION SENSOR
Abstract:
The invention relates to a micromechanical rotation acceleration sensor comprising a substrate element (1) on which a micromechanical sensor element (3) is provided in the form of two linear sensor structures (10,20) which are arranged at a defined distance from each other. The linear sensors (10,20) can rotate about a common axis (5). The inventive sensor also comprises an evaluating integrated circuit (100) which is integral with the substrate element (1) or an additional substrate. Said integrated circuit is connected to the linear sensor structures (10,20). The sensor signals can be evaluated in the evaluating integrated circuit in order to obtain a rotation acceleration signal (Υ). The linear sensors can be piezoelectric elements and are sensitive with respect to linear accelerations.