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1. (WO2001003172) METHOD FOR PRODUCING A THIN MEMBRANE AND RESULTING STRUCTURE WITH MEMBRANE
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2001/003172 International Application No.: PCT/FR2000/001898
Publication Date: 11.01.2001 International Filing Date: 29.06.2000
IPC:
H01L 21/20 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02
Manufacture or treatment of semiconductor devices or of parts thereof
04
the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
18
the devices having semiconductor bodies comprising elements of the fourth group of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
20
Deposition of semiconductor materials on a substrate, e.g. epitaxial growth
Applicants: ASPAR, Bernard[FR/FR]; FR (UsOnly)
BRUEL, Michel[FR/FR]; FR (UsOnly)
JAUSSAUD, Claude[FR/FR]; FR (UsOnly)
LAGAHE, Chrystelle[FR/FR]; FR (UsOnly)
COMMISSARIAT A L'ENERGIE ATOMIQUE[FR/FR]; 31-33, rue de la Fédération F-75752 Paris 15ème, FR (AllExceptUS)
Inventors: ASPAR, Bernard; FR
BRUEL, Michel; FR
JAUSSAUD, Claude; FR
LAGAHE, Chrystelle; FR
Agent: LEHU, Jean; Brevatome 3, rue du Docteur Lancereaux F-75008 Paris, FR
Priority Data:
99/0838030.06.1999FR
Title (EN) METHOD FOR PRODUCING A THIN MEMBRANE AND RESULTING STRUCTURE WITH MEMBRANE
(FR) PROCEDE DE REALISATION D'UNE MEMBRANE MINCE ET STRUCTURE A MEMBRANE AINSI OBTENUE
Abstract:
(EN) The invention concerns a method for producing a thin membrane, comprising the following steps which consist in: implanting gaseous species through a surface of a first substrate (10) and through a surface of a second substrate (20) for generating in said substrates microcavities (11, 21) delimiting for each substrate a thin layer (13, 23) sandwiched between said microcavities and the implanted surface, the microcavities being capable of causing, after they have been implanted, the thin layer to be detached from its substrate; assembling the first substrate (10) on the second substrate (20) such that their implanted surfaces are opposite each other; detaching each thin layer (13, 23) from its substrate (10, 20), the thin layers remaining assembled together to provide said thin membrane. The invention also concerns a structure with a thin membrane obtained by said method.
(FR) L'invention concerne un procédé de réalisation d'une membrane mince, comprenant les étapes suivantes: implantation d'espèces gazeuses au travers d'une face d'un premier substrat (10) et au travers d'une face d'un second substrat (20) apte à créer dans ces substrats des microcavités (11, 21) délimitant pour chaque substrat une couche mince (13, 23) comprise entre ces microcavités et la face implantée, les microcavités étant aptes à provoquer, postérieurement à leur implantation, le détachement de la couche mince de son substrat; assemblage du premier substrat (10) sur le second substrat (20) de façon que leurs faces implantées soient en regard; détachement de chaque couche mince (13, 23) de son substrat (10, 20), les couches minces restant assemblées entre elles pour fournir ladite membrane mince. L'invention concerne également une structure à membrane mince obtenue par ce procédé.
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Designated States: CN, JP, KR, SG, US
European Patent Office (EPO) (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE)
Publication Language: French (FR)
Filing Language: French (FR)