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1. (WO2001003166) METHOD FOR PRODUCING AN ELECTRODE
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2001/003166 International Application No.: PCT/DE2000/002032
Publication Date: 11.01.2001 International Filing Date: 23.06.2000
Chapter 2 Demand Filed: 22.11.2000
IPC:
H01L 21/02 (2006.01) ,H01L 21/8242 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02
Manufacture or treatment of semiconductor devices or of parts thereof
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
70
Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in or on a common substrate or of specific parts thereof; Manufacture of integrated circuit devices or of specific parts thereof
77
Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
78
with subsequent division of the substrate into plural individual devices
82
to produce devices, e.g. integrated circuits, each consisting of a plurality of components
822
the substrate being a semiconductor, using silicon technology
8232
Field-effect technology
8234
MIS technology
8239
Memory structures
8242
Dynamic random access memory structures (DRAM)
Applicants:
BRAUN, Georg [DE/DE]; DE (UsOnly)
HOENIGSCHMID, Heinz [DE/DE]; DE (UsOnly)
BEITEL, Gerhard [DE/DE]; DE (UsOnly)
WENDT, Hermann [DE/DE]; DE (UsOnly)
SÄNGER, Annette [DE/DE]; DE (UsOnly)
INFINEON TECHNOLOGIES AG [DE/DE]; St. Martin-Strasse 53 D-81541 München, DE (AllExceptUS)
Inventors:
BRAUN, Georg; DE
HOENIGSCHMID, Heinz; DE
BEITEL, Gerhard; DE
WENDT, Hermann; DE
SÄNGER, Annette; DE
Agent:
ZIMMERMANN & PARTNER; P.O. Box 330 920 80069 Munich, DE
Priority Data:
199 29 723.129.06.1999DE
Title (EN) METHOD FOR PRODUCING AN ELECTRODE
(FR) PROCEDE DE PRODUCTION D'UNE ELECTRODE
(DE) VERFAHREN ZUR HERSTELLUNG EINER ELEKTRODE
Abstract:
(EN) The invention relates to a method for producing an electrode (10) in which the electrode material (9), which frequently can only be etched with difficulty, no longer needs to be directly structured. The desired structure is firstly produced in the insulation layer (5) which can be easily etched and thus be easily structured, and is then filled in with the electrode material (9). This makes it possible to avoid a direct etching of the electrode material which exhibits all the cited problems.
(FR) L'invention concerne un procédé permettant de produire une électrode (10) selon lequel le matériau (9) avec lequel est produite l'électrode, qui est fréquemment difficile à décaper, n'a pas être structuré directement. La structure voulue est d'abord effectuée dans la couche d'isolation (5) qui est aisée à décaper et par conséquent aisée à structurer. Ladite couche d'isolation ainsi structurée est ensuite remplie avec le matériau (9) dans lequel est produite l'électrode. Ce procédé permet d'éviter un décapage direct du matériau dans lequel est produite l'électrode, avec tous les problèmes que cela implique.
(DE) Ein Verfahren zur Herstellung einer Elektrode (10) wird bereitgestellt, bei dem das häufig nur schwer ätzbare Elektrodenmaterial (9) nicht direkt strukturiert werden muß. Die gewünschte Struktur wird zuerst in der leicht ätzbaren und damit leicht zu strukturierenden Isolationschicht (5) erzeugt, die dann mit dem Elektrodenmaterial (9) aufgefüllt wird. Eine direkte Ätzung des Elektrodenmaterials mit all den genannten Problemen kann somit vermieden werden.
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Designated States: CN, JP, KR, US
European Patent Office (EPO) (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE)
Publication Language: German (DE)
Filing Language: German (DE)