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1. (WO2001003157) OBJECT INSPECTION AND/OR MODIFICATION SYSTEM AND METHOD

Pub. No.:    WO/2001/003157    International Application No.:    PCT/US2000/018041
Publication Date: Fri Jan 12 00:59:59 CET 2001 International Filing Date: Sat Jul 01 01:59:59 CEST 2000
IPC: B82B 3/00
G01Q 20/02
G01Q 70/02
G01Q 80/00
H01J 37/26
H01L 21/00
Applicants: GENERAL NANOTECHNOLOGY, LLC
KLEY, Victor, B.
Inventors: KLEY, Victor, B.
Title: OBJECT INSPECTION AND/OR MODIFICATION SYSTEM AND METHOD
Abstract:
A scanning probe microscope system (100) includes an objective lens (147), a clamping circuit (404), a tip deflection measurement circuit (421), a cantilever (136), and a probe (137) for modifying and inspecting an object (102) disposed on a stage (129).