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1. (WO2001001439) CHARGED PARTICLE DEVICE

Pub. No.:    WO/2001/001439    International Application No.:    PCT/EP2000/005800
Publication Date: Fri Jan 05 00:59:59 CET 2001 International Filing Date: Sat Jun 24 01:59:59 CEST 2000
IPC: H01J 37/244
H01J 37/28
Applicants: ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FÜR HALBLEITERPRÜFTECHNIK MBH
FEUERBAUM, Hans-Peter
WINKLER, Dieter
KELLA, Dror
Inventors: FEUERBAUM, Hans-Peter
WINKLER, Dieter
KELLA, Dror
Title: CHARGED PARTICLE DEVICE
Abstract:
The invention provides a charged particle device (1) comprising: a particle source (2) for providing a charged particle beam (4), an objective lens (10) for directing the particle beam onto a specimen (8), said objective lens (10) having an optical axis (6); a particle mirror (14) located on the optical axis (6) of the objective lens (10), said particle mirror having a front surface, a back surface, a drift region (26) reaching from the back surface to the front surface for letting the charged particle beam pass from the back surface to the front surface, said drift region (26) being positioned away from the optical axis (6), and a deflecting region located on the front surface for deflecting charge particles coming from the specimen towards a detector (16).