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1. (WO2001001121) MULTI-MODAL ANALYSIS OF MICROMECHANICAL STRUCTURES FOR SENSING APPLICATIONS

Pub. No.:    WO/2001/001121    International Application No.:    PCT/US2000/017379
Publication Date: Fri Jan 05 00:59:59 CET 2001 International Filing Date: Sat Jun 24 01:59:59 CEST 2000
IPC: G01N 27/00
Applicants: UT-BATTELLE, LLC
Inventors: ODEN, Patrick, Ian
BRITTON, Charles, L., Jr.
SMITH, Stephen, F.
WARMACK, Robert, J.
Title: MULTI-MODAL ANALYSIS OF MICROMECHANICAL STRUCTURES FOR SENSING APPLICATIONS
Abstract:
A device and method for determining concentrations of species in an environment using a mechanical resonator. The method employs one or more microcantilever structures where several mechanical mode resonances are determined for the structure during the measurement and used to determine environmental changes around the device or measure alterations in fundamental dimensions or material properties of the structure/material overlayer deposited on the structure.