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Machine translation
1. (WO2000063963) NON-ABRASIVE CONDITIONING FOR POLISHING PADS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2000/063963    International Application No.:    PCT/US2000/010144
Publication Date: 26.10.2000 International Filing Date: 14.04.2000
Chapter 2 Demand Filed:    15.11.2000    
IPC:
B24B 51/00 (2006.01), B24B 53/017 (2012.01), H01L 21/768 (2006.01), H01L 21/3105 (2006.01), H01L 21/321 (2006.01)
Applicants: SPEEDFAM-IPEC CORPORATION [US/US]; 305 North 54th Street, Chandler, AZ 85226 (US)
Inventors: LAURSEN, Thomas; (US)
Agent: FARMER, James, L.; Speedfam-Ipec Corporation, 305 North 54th Street, Chandler, AZ 85226 (US)
Priority Data:
09/294,406 19.04.1999 US
Title (EN) NON-ABRASIVE CONDITIONING FOR POLISHING PADS
(FR) CONDITIONNEMENT NON-ABRASIF DE TAMPONS DE POLISSAGE
Abstract: front page image
(EN)A method and apparatus for resurfacing a polishing pad using non-abrasive techniques. These techniques include shaving, milling, or planing the upper working surface of the polishing pad using an edged cutting tool to alter the microtexture and micro-topology of the surface to produce a desired surface contour or planarity. This precise conditioning of the microscopic features of the polishing pad surface controls dishing in workpieces during polishing.
(FR)L'invention concerne un procédé et un appareil servant à rectifier un tampon de polissage au moyen de techniques non abrasives. Ces techniques comprennent le rasage, le fraisage, ou le rabotage de la surface de travail supérieure du tampon de polissage à l'aide d'un outil à couper tranchant afin de modifier la micro-texture et la micro-topologie de la surface, en vue de produire un contour de surface souhaitée ou une planéité. Ce conditionnement précis des caractéristiques microscopiques de la surface du tampon de polissage commande le bombage des pièces à usiner pendant le polissage.
Designated States: DE, GB, JP, KR, SG.
Publication Language: English (EN)
Filing Language: English (EN)