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1. (WO2000063756) PARALLEL BYPASS TYPE FLUID FEEDING DEVICE, AND METHOD AND DEVICE FOR CONTROLLING FLUID VARIABLE TYPE PRESSURE SYSTEM FLOW RATE USED FOR THE DEVICE
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2000/063756    International Application No.:    PCT/JP2000/002160
Publication Date: 26.10.2000 International Filing Date: 03.04.2000
IPC:
G05D 7/06 (2006.01)
Applicants: FUJIKIN INCORPORATED [JP/JP]; 3-2, Itachibori 2-chome, Nishi-ku, Osaka-shi, Osaka 550-0012 (JP) (For All Designated States Except US).
OHMI, Tadahiro [JP/JP]; (JP).
TOKYO ELECTRON LTD. [JP/JP]; 3-6, Akasaka 5-chome, Minato-ku, Tokyo 107-0052 (JP) (For All Designated States Except US).
KAGATSUME, Satoshi [JP/JP]; (JP) (For US Only).
SUGIYAMA, Kazuhiko [JP/JP]; (JP) (For US Only).
MINAMI, Yukio [JP/JP]; (JP) (For US Only).
NISHINO, Kouji [JP/JP]; (JP) (For US Only).
DOHI, Ryousuke [JP/JP]; (JP) (For US Only).
YONEHANA, Katsunori [JP/JP]; (JP) (For US Only).
IKEDA, Nobukazu [JP/JP]; (JP) (For US Only).
YAMAJI, Michio [JP/JP]; (JP) (For US Only).
HIROSE, Jun [JP/JP]; (JP) (For US Only).
FUKAZAWA, Kazuo [JP/JP]; (JP) (For US Only).
KOIZUMI, Hiroshi [JP/JP]; (JP) (For US Only).
NAGAOKA, Hideki [JP/JP]; (JP) (For US Only).
MORIMOTO, Akihiro [JP/JP]; (JP) (For US Only).
UNO, Tomio [JP/JP]; (JP) (For US Only).
IDETA, Eiji [JP/JP]; (JP) (For US Only).
MATSUMOTO, Atsushi [JP/JP]; (JP) (For US Only).
UENOYAMA, Toyomi [JP/JP]; (JP) (For US Only).
HIROSE, Takashi [JP/JP]; (JP) (For US Only)
Inventors: OHMI, Tadahiro; (JP).
KAGATSUME, Satoshi; (JP).
SUGIYAMA, Kazuhiko; (JP).
MINAMI, Yukio; (JP).
NISHINO, Kouji; (JP).
DOHI, Ryousuke; (JP).
YONEHANA, Katsunori; (JP).
IKEDA, Nobukazu; (JP).
YAMAJI, Michio; (JP).
HIROSE, Jun; (JP).
FUKAZAWA, Kazuo; (JP).
KOIZUMI, Hiroshi; (JP).
NAGAOKA, Hideki; (JP).
MORIMOTO, Akihiro; (JP).
UNO, Tomio; (JP).
IDETA, Eiji; (JP).
MATSUMOTO, Atsushi; (JP).
UENOYAMA, Toyomi; (JP).
HIROSE, Takashi; (JP)
Agent: SUGIMOTO, Takeo; Kitahama-Katano Building, 1-21, Kitahama 2-chome, Chuo-ku, Osaka-shi, Osaka 541-0041 (JP)
Priority Data:
11/108689 16.04.1999 JP
11/129109 10.05.1999 JP
Title (EN) PARALLEL BYPASS TYPE FLUID FEEDING DEVICE, AND METHOD AND DEVICE FOR CONTROLLING FLUID VARIABLE TYPE PRESSURE SYSTEM FLOW RATE USED FOR THE DEVICE
(FR) DISPOSITIF D'ALIMENTATION EN FLUIDE DU TYPE DERIVATION PARALLELE, ET PROCEDE ET DISPOSITIF DE COMMANDE DU DEBIT D'UN SYSTEME DE PRESSION DU TYPE A FLUIDE VARIABLE UTILISE DANS LEDIT DISPOSITIF
Abstract: front page image
(EN)A fluid feeding device having a plurality of flow paths disposed in parallel with each other starting at a regulator for pressure regulation, wherein a mass flow controller for flow control or a pressure system flow control device is disposed in each flow path so that the opening and closing operations for fluid supply in each flow path do not provide a transient variation in a stable supply to the other flow paths and, when the fluid supply in a flow path is changed from close to open, a set flow rate is reached a specified delay time after the start of the operation of the mass flow controller in that flow path.
(FR)L'invention concerne un dispositif d'alimentation en fluide comportant une pluralité de voies d'écoulement disposées parallèlement les unes aux autres, et partant d'un régulateur de manière à réguler la pression. Le dispositif est caractérisé en ce qu'un contrôleur de débit massique permettant de réguler l'écoulement ou de commander le dispositif de régulation d'écoulement du système de pression est disposé dans chaque voie d'écoulement, de manière que les opérations d'ouverture et de fermeture de l'alimentation en fluide de chacune des voies ne produisent pas de variation transitoire de l'alimentation stable des autres voies d'écoulement, et que lorsque l'alimentation en fluide d'une voie d'écoulement est ouverte après fermeture, on atteigne un débit déterminé après un laps de temps défini à la suite de l'entrée en fonction du contrôleur de débit massique dans ladite voie d'écoulement.
Designated States: KR, US.
European Patent Office (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)