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1. (WO2000062332) ARRANGEMENT FOR STORING OBJECTS, PARTICULARLY FOR STORING DISKLIKE OBJECTS SUCH AS WAFERS, FLAT PANELS OR CDs

Pub. No.:    WO/2000/062332    International Application No.:    PCT/EP2000/002959
Publication Date: Oct 19, 2000 International Filing Date: Apr 3, 2000
IPC: H01L 21/677
Applicants: SEMICONDUCTOR 300 GMBH & CO. KG
MISSALE, Reiner
HAHN, Sven
Inventors: MISSALE, Reiner
HAHN, Sven
Title: ARRANGEMENT FOR STORING OBJECTS, PARTICULARLY FOR STORING DISKLIKE OBJECTS SUCH AS WAFERS, FLAT PANELS OR CDs
Abstract:
It is described an arrangement (10) for storing objects such like wafers (23), flat panels or CDs in the field of semiconductor technology. Arrangement (10) comprises a storage cabinet (24) being formed as a closed system (12) to provide minienvironment conditions therein. Inside storage cabinet (24), a number of stationary held containers (13) for storing wafers (23) is provided, said containers (13) being locked by a door (14) respectively. In order to save handling time for the load/unload operation of wafers (23) in arrangement (10), movable means (15) for handling wafers (23) and movable door opening means (16) for opening/closing doors (14) are provided. Means (16) and means (15) are adapted to be moved to containers (13). According to the invention, means (15) and means (16) may be combined to a single device (17) for loading/unloading wafers (23) which may be formed as a robot arm.