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1. (WO2000058688) DETECTION OF CHEMICALS USING PHOTO-INDUCED AND THERMAL BENDING IN MEMS SENSORS

Pub. No.:    WO/2000/058688    International Application No.:    PCT/US2000/008055
Publication Date: Oct 5, 2000 International Filing Date: Mar 27, 2000
IPC: G01B 7/34
G01N 25/34
G01N 33/22
Applicants: UT-BATTELLE, LLC
Inventors: DATSKOS, Panagiotis, G.
Title: DETECTION OF CHEMICALS USING PHOTO-INDUCED AND THERMAL BENDING IN MEMS SENSORS
Abstract:
A method for measuring chemical analytes and physical forces by measuring changes in the deflection of a microelectromechanical cantilever structure while it is being irradiated by a light having an energy above the band gap of the structure.