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Machine translation
1. (WO2000058048) HYBRID HEATER WITH CERAMIC FOIL SERRATED PLATE AND GAS ASSIST
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2000/058048    International Application No.:    PCT/US2000/004252
Publication Date: 05.10.2000 International Filing Date: 18.02.2000
Chapter 2 Demand Filed:    16.10.2000    
IPC:
H01L 21/00 (2006.01), H05B 3/00 (2006.01), H05B 3/12 (2006.01)
Applicants: BROOKS AUTOMATION, INC. [US/US]; 15 Elizabeth Drive, Chelmsford, MA 01824 (US)
Inventors: MOSCHINI, Lawrence, R.; (US)
Agent: GREEN, Clarence, A.; Perman & Green, LLP, 435 Post Road, Fairfield, CT 06430 (US)
Priority Data:
09/280,751 29.03.1999 US
Title (EN) HYBRID HEATER WITH CERAMIC FOIL SERRATED PLATE AND GAS ASSIST
(FR) UNITE DE CHAUFFAGE HYBRIDE COMPORTANT UNE PLAQUE STRIEE A FEUILLE DE CERAMIQUE ET UTILISANT LE GAZ
Abstract: front page image
(EN)A substrate heating apparatus having a chamber (34), a device for adding gas into the chamber and a substrate heater is provided. The substrate heater is located within the chamber and includes a first plate (54) having a bottom surface. The bottom surface of the first plate has at least one groove. The at least one groove forms at least two thermal zones on the first plate. The substrate heater further includes a heater element (66) and a second plate (52). The heater element is located between the bottom surface of the first plate and the second plate and thus enables heating of the substrate by radiation and gas conduction.
(FR)Cette invention concerne un appareil de chauffage de substrats, lequel comprend une chambre, un dispositif permettant d'ajouter du gaz dans ladite chambre (34), et une unité de chauffage de substrat. L'unité de chauffage de substrat est située dans la chambre et comprend une première plaque (54) qui possède une surface inférieure. La surface inférieure de la première plaque comporte au moins une gorge, laquelle forme au moins deux zones thermiques sur ladite première plaque. L'unité de chauffage de substrat comprend en outre un élément chauffant (66) et une seconde plaque (52). L'élément chauffant est disposé entre la surface inférieure de la première plaque et la seconde plaque, et permet ainsi de chauffer un substrat par rayonnement et conduction du gaz.
Designated States: AE, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, CA, CH, CN, CU, CZ, DE, DK, EE, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MD, MG, MK, MN, MW, MX, NO, NZ, PL, PT, RO, RU, SD, SE, SG, SI, SK, SL, TJ, TM, TR, TT, UA, UG, UZ, VN, YU, ZA, ZW.
African Regional Intellectual Property Organization (GH, GM, KE, LS, MW, SD, SL, SZ, TZ, UG, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)