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1. WO2000043839 - HYBRID AERIAL IMAGE SIMULATION

Publication Number WO/2000/043839
Publication Date 27.07.2000
International Application No. PCT/US2000/001486
International Filing Date 20.01.2000
Chapter 2 Demand Filed 10.08.2000
IPC
G03F 7/20 2006.01
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20Exposure; Apparatus therefor
CPC
G03F 7/705
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR;
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
70Exposure apparatus for microlithography
70483Information management, control, testing, and wafer monitoring, e.g. pattern monitoring
70491Information management and control, including software
705Modelling and simulation from physical phenomena up to complete wafer process or whole workflow in wafer fabrication
Applicants
  • LSI LOGIC CORPORATION [US/US]; 1551 McCarthy Boulevard Patent Law Dept. M/S: D-106 Milpitas, CA 95035, US
Inventors
  • MEDVEDEVA, Marina, G.; RU
  • SCEPANOVIC, Ranko; US
  • PETRANOVIC, Dusan; US
Agents
  • PURSEL, David, G.; LSI Logic Corporation 1551 McCarthy Boulevard Patent Dept. M/S: D-106 Milpitas, CA 95035, US
Priority Data
09/233,88520.01.1999US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) HYBRID AERIAL IMAGE SIMULATION
(FR) SIMULATION HYBRIDE D'IMAGES AERIENNES
Abstract
(EN)
An aerial image produced by a mask having transmissive portions is simulated by dividing the transmissive portions of the mask into primitive elements and obtaining a spatial frequency function corresponding to each of the primitive elements. The spatial frequency functions corresponding to the primitive elements are combined to obtain a transformed mask transmission function, and the transformed mask transmission function is utilized to generate a simulation of the aerial image.
(FR)
Pour simuler une image aérienne produite par un masque comportant des zones transmissives, on divise lesdites parties transmissives en éléments primitifs et on obtient une fonction de fréquence spatiale correspondant à chacun desdits éléments primitifs. On combine les fonctions de fréquence spatiale correspondant aux éléments primitifs de façon à obtenir une fonction de transmission de masque transformée et on utilise ladite fonction de transmission pour générer une simulation de l'image aérienne.
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