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1. WO2000043772 - MICRO-MACHINED THIN FILM HYDROGEN GAS SENSOR, AND METHOD OF MAKING AND USING THE SAME

Publication Number WO/2000/043772
Publication Date 27.07.2000
International Application No. PCT/US2000/000765
International Filing Date 12.01.2000
Chapter 2 Demand Filed 08.08.2000
IPC
G01N 21/59 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
59Transmissivity
G01N 21/78 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
75Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
77by observing the effect on a chemical indicator
78producing a change of colour
G01N 27/12 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
27Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
02by investigating impedance
04by investigating resistance
12of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid
G01N 33/00 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
33Investigating or analysing materials by specific methods not covered by groups G01N1/-G01N31/131
CPC
G01N 21/59
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
59Transmissivity
G01N 21/783
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
75Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
77by observing the effect on a chemical indicator
78producing a change of colour
783for analysing gases
G01N 2291/02863
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
2291Indexing codes associated with group G01N29/00
02Indexing codes associated with the analysed material
028Material parameters
02863Electric or magnetic parameters
G01N 27/12
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
27Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
02by investigating the impedance of the material
04by investigating resistance
12of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid ; , for detecting components in the fluid
G01N 27/128
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
27Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
02by investigating the impedance of the material
04by investigating resistance
12of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid ; , for detecting components in the fluid
128Microapparatus
G01N 33/0014
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
33Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
0004Gaseous mixtures, e.g. polluted air
0009General constructional details of gas analysers, e.g. portable test equipment
0011Sample conditioning
0014by eliminating a gas
Applicants
  • ADVANCED TECHNOLOGY MATERIALS, INC. [US/US]; 7 Commerce Drive Danbury, CT 06810, US
Inventors
  • DIMEO, Frank, Jr.; US
  • BHANDARI, Gautam; US
Agents
  • ZITZMANN, Oliver, A., M.; Advanced Technology Materials, Inc. 7 Commerce Drive Danbury, CT 06810, US
Priority Data
09/231,27715.01.1999US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) MICRO-MACHINED THIN FILM HYDROGEN GAS SENSOR, AND METHOD OF MAKING AND USING THE SAME
(FR) CAPTEUR DE GAZ HYDROGENE A FILM MINCE MICRO-USINE ET SON PROCEDE DE FABRICATION ET D'UTILISATION
Abstract
(EN)
A hydrogen sensor including a thin film sensor element formed, e.g., by metalorganic chemical vapor deposition (MOCVD) or physical vapor deposition (PVD), on a micro-hotplate structure. The thin film sensor element includes a film of a hydrogen-interactive metal film that reversibly interacts with hydrogen to provide a correspondingly altered response characteristic, such as optical transmissivity, electrical conductance, electrical resistance, electrical capacitance, magnetoresistance, photoconductivity, etc., relative to the response characteristic of the film in the absence of hydrogen. The hydrogen-interactive metal film may be overcoated with a thin film hydrogen-permeable barrier layer to protect the hydrogen-interactive film from deleterious interaction with non-hydrogen species. The hydrogen sensor of the invention may be usefully employed for the detection of hydrogen in an environment susceptible to the incursion or generation of hydrogen and may be conveniently configured as a hand-held apparatus.
(FR)
L'invention porte sur un capteur d'hydrogène comprenant un élément à film mince formé, p. ex., par dépôt chimique en phase vapeur organométallique ou par dépôt physique en phase vapeur sur une structure de micro-plaque chauffante. Cet élément de capteur à film mince comprend un film métallique ayant une interaction avec l'hydrogène de manière réversible de façon à générer une caractéristique de réponse modifiée concomitamment telle que la transmissivité optique, la conductance électrique, la résistance électrique, la capacitance électrique, la résistance magnétique, la photoconductivité, etc., par rapport à la caractéristique de réponse du film en l'absence d'hydrogène. Le film métallique ayant une interaction avec l'hydrogène peut être recouvert d'une couche barrière perméable à l'hydrogène de façon à protéger le film des interactions délétères avec des espèces non hydrogène. Le capteur d'hydrogène de cette invention peut être utilisé dans la détection d'hydrogène dans un environnement sensible à l'incursion ou la génération d'hydrogène et peut être configuré sans inconvénient sous forme d'un dispositif portable.
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