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1. WO2000043130 - FLOW CONTROLLER

Publication Number WO/2000/043130
Publication Date 27.07.2000
International Application No. PCT/US2000/001493
International Filing Date 20.01.2000
Chapter 2 Demand Filed 24.07.2000
IPC
B05C 11/10 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
05SPRAYING OR ATOMISING IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
CAPPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
11Component parts, details or accessories not specifically provided for in groups B05C1/-B05C9/132
10Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
G03F 7/16 2006.01
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
16Coating processes; Apparatus therefor
CPC
B05C 11/1013
BPERFORMING OPERATIONS; TRANSPORTING
05SPRAYING OR ATOMISING IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
CAPPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
11Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
10Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
1002Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
1007responsive to condition of liquid or other fluent material
1013responsive to flow or pressure of liquid or other fluent material
B05C 11/1026
BPERFORMING OPERATIONS; TRANSPORTING
05SPRAYING OR ATOMISING IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
CAPPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
11Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
10Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
1002Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
1026Valves
B05C 5/02
BPERFORMING OPERATIONS; TRANSPORTING
05SPRAYING OR ATOMISING IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
CAPPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
5Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
02the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g.; from an outlet device in contact or almost in contact, with the work
G03F 7/16
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR;
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
16Coating processes; Apparatus therefor
G05D 16/2013
GPHYSICS
05CONTROLLING; REGULATING
DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
16Control of fluid pressure
20characterised by the use of electric means
2006with direct action of electric energy on controlling means
2013using throttling means as controlling means
G05D 16/2026
GPHYSICS
05CONTROLLING; REGULATING
DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
16Control of fluid pressure
20characterised by the use of electric means
2006with direct action of electric energy on controlling means
2013using throttling means as controlling means
2026with a plurality of throttling means
Applicants
  • MYKROLIS CORPORATION [US/US]; One Patriots Park Bedford, MA 01730, US (AllExceptUS)
  • MCLOUGHLIN, Robert, F. [US/US]; US (UsOnly)
  • GONNELLA, George, L. [US/US]; US (UsOnly)
  • KING, Timothy, J. [US/US]; US (UsOnly)
Inventors
  • MCLOUGHLIN, Robert, F.; US
  • GONNELLA, George, L.; US
  • KING, Timothy, J.; US
Agents
  • LEMACK, Kevin, S. ; Nields, Lemack & Dingman Suite 8 176 E. Main Street Westboro, MA 01581, US
Priority Data
60/116,51120.01.1999US
60/143,37012.07.1999US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) FLOW CONTROLLER
(FR) REGULATEUR DE DEBIT
Abstract
(EN)
A control system for digitally monitoring and/or controlling pressure to a pneumatic load such as a stop/suckback valve (10). Pressure is sensed (24, 25) in the pneumatic fluid input lines to the pneumatic load, and a closed loop control (30) is used to maintain the pressure at a predetermined level. In an alternative embodiment, the control sytem is used to ensure equal dispensing in multipoint dispense apparatus. Thus, pressure is sensed downstream of each valve (10a, 10b, 10c) in fluid communication with a respective nozzle (A, B, C). Any pressure differential detected is corrected by appropriate valve adjustment.
(FR)
Système de commande permettant de contrôler et/ou de réguler numériquement la pression amenée à une charge pneumatique telle qu'un robinet d'arrêt/réaspiration (10). La pression est détectée (24, 25) dans les conduites d'entrée du fluide pneumatique aboutissant à la charge pneumatique et un système de commande en boucle fermée (30) permet de maintenir la pression à un niveau prédéterminé. Dans un autre mode de réalisation, le système de commande permet d'assurer une distribution homogène dans un dispositif distributeur multipoint. La pression est ainsi détectée en aval de chaque robinet (10a, 10b, 10c) en communication fluidique avec la busette correspondante (A, B, C). Toute différence de pression détectée est corrigée par un réglage approprié des robinets.
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