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1. WO2000042330 - SHAFT BEARING

Publication Number WO/2000/042330
Publication Date 20.07.2000
International Application No. PCT/DE2000/000048
International Filing Date 05.01.2000
Chapter 2 Demand Filed 18.05.2000
IPC
F16C 31/00 2006.01
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS OR UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
CSHAFTS; FLEXIBLE SHAFTS; MECHANICAL MEANS FOR TRANSMITTING MOVEMENT IN A FLEXIBLE SHEATHING; ELEMENTS OF CRANKSHAFT MECHANISMS; PIVOTS; PIVOTAL CONNECTIONS; ROTARY ENGINEERING ELEMENTS OTHER THAN GEARING, COUPLING, CLUTCH OR BRAKE ELEMENTS; BEARINGS
31Bearings for parts which both rotate and move linearly
F16C 33/72 2006.01
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS OR UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
CSHAFTS; FLEXIBLE SHAFTS; MECHANICAL MEANS FOR TRANSMITTING MOVEMENT IN A FLEXIBLE SHEATHING; ELEMENTS OF CRANKSHAFT MECHANISMS; PIVOTS; PIVOTAL CONNECTIONS; ROTARY ENGINEERING ELEMENTS OTHER THAN GEARING, COUPLING, CLUTCH OR BRAKE ELEMENTS; BEARINGS
33Parts of bearings; Special methods for making bearings or parts thereof
72Sealings
H01L 21/687 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683for supporting or gripping
687using mechanical means, e.g. chucks, clamps or pinches
CPC
F16C 31/00
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
31Bearings for parts which both rotate and move linearly
F16C 33/72
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
33Parts of bearings; Special methods for making bearings or parts thereof
72Sealings
H01L 21/687
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
683for supporting or gripping
687using mechanical means, e.g. chucks, clamps or pinches
Applicants
  • INFINEON TECHNOLOGIES AG [DE/DE]; St.-Martin-Strasse 53 D-81541 München, DE (AllExceptUS)
  • ELLINGER, Stefan [DE/DE]; DE (UsOnly)
Inventors
  • ELLINGER, Stefan; DE
Agents
  • MÜLLER & HOFFMANN; Innere Wiener Str. 17 81667 München, DE
Priority Data
199 00 807.812.01.1999DE
Publication Language German (DE)
Filing Language German (DE)
Designated States
Title
(DE) SCHAFTLAGER
(EN) SHAFT BEARING
(FR) PALIER DE TIGE
Abstract
(DE)
Herkömmliche Schaftlager erlauben keine zuverlässige langfristige Abdichtung eines Schafts in einem Lager gegenüber Rotationsbewegungen und Transversalverschiebungen. Die vorliegende Erfindung löst dieses Problem, indem Transversalverschiebung und Rotation voneinander entkoppelt werden, um jede einzeln optimal abdichten zu können. Demgemäß stellt die vorliegende Erfindung ein Schaftlager mit einem Stator (17) und einem Rotor (20) bereit, wobei ein Schaft (10) transversal verschieblich und rotierbar durch den Rotor (20) durchgeführt ist, und der Rotor (20) im Stator (17) gelagert ist, und wobei der Zwischenraum zwischen Rotor (20) und Stator (17) mit einer magnetisierbaren Emulsion abgedichtet ist und weiterhin ein Faltenbalgen zumindest einen Teil des Schafts (10) umgibt, wobei der Balgen an seinem einen Ende am Rotor (20) befestigt ist und an seinem dem Rotor abgewandten Ende (24) mit dem Schaft (10) abdichtend verbunden ist.
(EN)
The aim of the invention is to provide a shaft bearing which permits a reliable and long-lasting sealing of the shaft in a bearing vis-à-vis rotational movements and transversal displacements. To this end, the transversal displacement and rotation are decoupled so that in either situation an individual and optimum sealing can be provided. The present invention provides a shaft bearing with a stator (17) and a rotor (20), wherein a shaft (10) extends through the rotor (20) in a manner to be transversally displaceable and rotatable and the rotor (20) rests in the stator (17). The space between said rotor (20) and said stator (17) is sealed by means of a magnetizable emulsion. At least a part of the shaft (10) is surrounded by expansion bellows. Said bellows are fixed on one end to the rotor (20) and are linked with the shaft (10) at the end (24) facing away from the rotor (20) in a sealing manner.
(FR)
Dans les paliers de tige traditionnels, l'étanchéité durable d'une tige dans un palier n'est pas assurée eu égard aux mouvements de rotation et aux déplacements transversaux. La présente invention vise à résoudre ce problème par découplage du déplacement transversal et de la rotation l'un de l'autre, ce découplage permettant d'étanchéifier chaque mouvement indépendamment de manière optimale. A cet effet, le palier de tige selon l'invention comporte un stator (17) et un rotor (20) et est caractérisé en ce qu'une tige (10), rotative et à déplacement transversal, traverse le rotor (20), en ce que le rotor (20) est logé dans le stator (17) et en ce que l'espace entre le rotor (20) et le stator (17) est rendu étanche avec une émulsion magnétisable. De plus, un soufflet, fixé au rotor (20) à une de ses extrémités et relié étanche à la tige (10) à son extrémité (24) opposée au rotor, entoure au moins une partie de la tige (10).
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