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1. WO2000041281 - METHOD AND APPARATUS FOR HERMETICALLY SEALING PHOTONIC DEVICES

Publication Number WO/2000/041281
Publication Date 13.07.2000
International Application No. PCT/US1999/027259
International Filing Date 18.11.1999
Chapter 2 Demand Filed 18.07.2000
IPC
H01S 5/022 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
5Semiconductor lasers
02Structural details or components not essential to laser action
022Mountings; Housings
H01S 5/183 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
5Semiconductor lasers
10Construction or shape of the optical resonator
18Surface-emitting lasers
183having a vertical cavity
CPC
H01S 5/0222
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
5Semiconductor lasers
02Structural details or components not essential to laser action
022Mountings; Housings
0222filled with special gases
H01S 5/02288
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
5Semiconductor lasers
02Structural details or components not essential to laser action
022Mountings; Housings
0228Out-coupling light
02288with a lens
H01S 5/183
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
5Semiconductor lasers
10Construction or shape of the optical resonator ; , e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
18Surface-emitting [SE] lasers
183having a vertical cavity [VCSE-lasers]
Applicants
  • HONEYWELL INC. [US/US]; 101 Columbia Road Morristown, NJ 07962, US
Inventors
  • ZHOU, Ping; US
Agents
  • SHUDY, John, G., Jr.; Honeywell Inc. 101 Columbia Road P.O. Box 2245 Morristown, NJ 07692-2245, US
Priority Data
09/224,21030.12.1998US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) METHOD AND APPARATUS FOR HERMETICALLY SEALING PHOTONIC DEVICES
(FR) PROCEDE ET APPAREIL POUR FERMETURE HERMETIQUE DE DISPOSITIFS PHOTONIQUES
Abstract
(EN)
A hermetically sealed photonic device submount includes a photonic device mounted on a substrate material and sealed in a flexible hermetic seal. In one configuration, the photonic device is configured to emit or to receive light through the substrate material. In this configuration, the photonic device is covered with an adhesive layer and a metal layer deposited onto the adhesive layer. In another configuration, the photonic device is configured to emit or to receive light in a direction substantially vertically upward from the substrate material. In this configuration, a cover is placed over the photonic device, then the cover is hermetically sealed to the substrate material with an adhesive layer and a metal layer deposited onto the adhesive layer. In both configurations, the photonic device submounts are hermetically sealed according to various aspects of the present invention on the substrate material without using a separate package. Accordingly, any number of hermetically sealed photonic device submounts can be mass produced on wafers using the present invention.
(FR)
L'invention porte sur une embase fermée hermétiquement comprenant un dispositif photonique monté sur un matériau de susbtrat et scellé dans un joint hermétique flexible. Selon une configuration, les dispositifs photoniques sont configurés de façon à émettre ou à recevoir la lumière via le matériau du substrat. Dans cette configuration, le dispositif photonique est recouvert d'une couche adhésive et d'une couche métallique déposée sur la couche adhésive. Selon une autre configuration, le dispositif photonique est configuré de façon à émettre ou recevoir la lumière pratiquement verticalement depuis le matériau du substrat. Dans cette configuration, un couvercle placé sur le dispositif photonique est hermétiquement scellé sur le matériau du substrat par une couche adhésive et une couche métallique déposée sur la couche adhésive. Dans les deux configurations, les embases des dispositifs photoniques sont hermétiquement scellées selon diverses variantes sur le matériau du substrat sans utiliser de boîtier séparé. En conséquence, il est possible, selon cette invention, de produire en série sur des tranches une certaine quantité d'embases de dispositifs photoniques fermés hermétiquement.
Also published as
Latest bibliographic data on file with the International Bureau