Processing

Please wait...

Settings

Settings

1. WO2000040512 - SLUDGE-FREE TREATMENT OF COPPER CMP WASTES

Publication Number WO/2000/040512
Publication Date 13.07.2000
International Application No. PCT/US1999/018184
International Filing Date 10.08.1999
Chapter 2 Demand Filed 16.06.2000
IPC
C02F 1/42 2006.01
CCHEMISTRY; METALLURGY
02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
1Treatment of water, waste water, or sewage
42by ion-exchange
C02F 1/467 2006.01
CCHEMISTRY; METALLURGY
02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
1Treatment of water, waste water, or sewage
46by electrochemical methods
461by electrolysis
467by electrochemical disinfection
C02F 1/469 2006.01
CCHEMISTRY; METALLURGY
02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
1Treatment of water, waste water, or sewage
46by electrochemical methods
469by electrochemical separation, e.g. by electro-osmosis, electrodialysis, electrophoresis
C02F 11/00 2006.01
CCHEMISTRY; METALLURGY
02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
11Treatment of sludge; Devices therefor
CPC
C02F 1/42
CCHEMISTRY; METALLURGY
02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
1Treatment of water, waste water, or sewage
42by ion-exchange
C02F 1/4678
CCHEMISTRY; METALLURGY
02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
1Treatment of water, waste water, or sewage
46by electrochemical methods
461by electrolysis
467by electrochemical disinfection; by electrooxydation or by electroreduction
4676by electroreduction
4678of metals
C02F 1/469
CCHEMISTRY; METALLURGY
02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
1Treatment of water, waste water, or sewage
46by electrochemical methods
469by electrochemical separation, e.g. by electro-osmosis, electrodialysis, electrophoresis
C02F 11/004
CCHEMISTRY; METALLURGY
02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
11Treatment of sludge; Devices therefor
004Sludge detoxification
C02F 2101/20
CCHEMISTRY; METALLURGY
02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
2101Nature of the contaminant
10Inorganic compounds
20Heavy metals or heavy metal compounds
C02F 2103/346
CCHEMISTRY; METALLURGY
02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
2103Nature of the water, waste water, sewage or sludge to be treated
34from industrial activities not provided for in groups C02F2103/12 - C02F2103/32
346from semiconductor processing, e.g. waste water from polishing of wafers
Applicants
  • ADVANCED MICRO DEVICES, INC. [US/US]; One AMD Place Mail Stop 68 Sunnyvale, CA 94088-3453, US
Inventors
  • DUNGAN, Lawrence, James; US
  • HAN, Leon; US
Agents
  • RODDY, Richard, J.; Advanced Micro Devices, Inc. One AMD Place, Mail Stop 68 Sunnyvale, CA 94088-3453, US
  • BROOKES BATCHELLOR; 102-108 Clerkenwell Road 52-54 High Holborn London EC1M 5SA, GB
Priority Data
09/225,21004.01.1999US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) SLUDGE-FREE TREATMENT OF COPPER CMP WASTES
(FR) TRAITEMENT DEPOURVU DE BOUES DE DECHETS DE POLISSAGE ELECTROMECANIQUE DE CUIVRE
Abstract
(EN)
Waste slurry containing dissolved metal from CMP (11), e.g., is subjected to sludge-free processing. Embodiments include separating the waste slurry with a solids filter (13) into a solid-free dissolved metal-containing liquid filtrate portion (18) and a concentrated solids-containing portion (16), removing the dissolved metal from the filtrate by means of an ion exchanger (20), back-washing the concentrated solids-containing portion with metal-free effluent (25) from the ion exchanger (20) to further reduce its dissolved metal content, discharging the washed concentrated solids-containing portion to a waste drain (23), removing the metal from the ion exchanger in solution form, and optionally extracting solid metal from the solution by electrowinning (32).
(FR)
Selon l'invention, une bouillie de déchets contenant du métal dissous provenant du polissage électromécanique (11), par exemple, est soumise à un traitement sans boue. Les modes de réalisation de la présente invention consistent à séparer la bouillie de déchets avec un filtre de solides (13) dans une partie de filtrat liquide contenant des métaux dissous sans solides (18) et une partie contenant des solides concentrés (16). Ces modes de réalisation consistent ensuite à retirer le métal dissous du filtrat au moyen d'un échangeur d'ions (20), à laver à contre courant la partie contenant des solides concentrés avec un effluent dépourvu de métaux (25) à partir de l'échangeur d'ions (20) pour réduire encore sa teneur en métal dissout, à décharger la partie contenant des solides concentrés lavés dans une canalisation de décharge (23) à retirer le métal de l'échangeur d'ions sous forme de solution, et à extraire éventuellement le métal solide de la solution par extraction électrolytique (32).
Latest bibliographic data on file with the International Bureau