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1. WO2000040347 - NON-CORROSIVE CLEANING COMPOSITION AND METHOD FOR REMOVING PLASMA ETCHING RESIDUES

Publication Number WO/2000/040347
Publication Date 13.07.2000
International Application No. PCT/US1999/028382
International Filing Date 01.12.1999
Chapter 2 Demand Filed 21.07.2000
IPC
C11D 7/26 2006.01
CCHEMISTRY; METALLURGY
11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
7Compositions of detergents based essentially on non-surface-active compounds
22Organic compounds
26containing oxygen
C11D 7/32 2006.01
CCHEMISTRY; METALLURGY
11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
7Compositions of detergents based essentially on non-surface-active compounds
22Organic compounds
32containing nitrogen
C11D 7/34 2006.01
CCHEMISTRY; METALLURGY
11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
7Compositions of detergents based essentially on non-surface-active compounds
22Organic compounds
34containing sulfur
C11D 7/50 2006.01
CCHEMISTRY; METALLURGY
11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
7Compositions of detergents based essentially on non-surface-active compounds
50Solvents
C11D 11/00 2006.01
CCHEMISTRY; METALLURGY
11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
11Special methods for preparing compositions containing mixtures of detergents
CPC
C11D 11/0047
CCHEMISTRY; METALLURGY
11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
DDETERGENT COMPOSITIONS
11Special methods for preparing compositions containing mixtures of detergents
0005Special cleaning and washing methods
0011characterised by the objects to be cleaned
0023"Hard" surfaces
0047Electronic devices, e.g. PCBs, semiconductors
C11D 7/264
CCHEMISTRY; METALLURGY
11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
DDETERGENT COMPOSITIONS
7Compositions of detergents based essentially on non-surface-active compounds
22Organic compounds
26containing oxygen
264Aldehydes; Ketones; Acetals; Ketals
C11D 7/265
CCHEMISTRY; METALLURGY
11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
DDETERGENT COMPOSITIONS
7Compositions of detergents based essentially on non-surface-active compounds
22Organic compounds
26containing oxygen
265Carboxylic acids; Salts thereof
C11D 7/32
CCHEMISTRY; METALLURGY
11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
DDETERGENT COMPOSITIONS
7Compositions of detergents based essentially on non-surface-active compounds
22Organic compounds
32containing nitrogen
C11D 7/3218
CCHEMISTRY; METALLURGY
11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
DDETERGENT COMPOSITIONS
7Compositions of detergents based essentially on non-surface-active compounds
22Organic compounds
32containing nitrogen
3218Alkanolamines; Alkanolimines
C11D 7/3245
CCHEMISTRY; METALLURGY
11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
DDETERGENT COMPOSITIONS
7Compositions of detergents based essentially on non-surface-active compounds
22Organic compounds
32containing nitrogen
3245Aminoacids
Applicants
  • ARCH SPECIALTY CHEMICALS, INC. [US/US]; 501 Merritt 7 Norwalk, CT 06856-4500, US
Inventors
  • HONDA, Kenji; US
  • ROTHGERY, Eugene, F.; US
Agents
  • GREELEY, Paul, D.; Ohlandt, Greeley, Ruggiero & Perle, L.L.P. One Landmark Square 9th floor Stamford, CT 06901-2682, US
Priority Data
09/224,49331.12.1998US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) NON-CORROSIVE CLEANING COMPOSITION AND METHOD FOR REMOVING PLASMA ETCHING RESIDUES
(FR) COMPOSITION NON CORROSIVE DE NETTOYAGE SERVANT A ELIMINER LES RESIDUS DE PHOTORESIST ET DE GRAVURE AU PLASMA
Abstract
(EN)
Non-corrosive cleaning compositions that are useful for removing photoresist and plasma etch residues from a substrate. The cleaning composition comprises, by weight: (i) 30-70 % of a hydroxy-(lower alkyl)-hydrazine; (ii) 70-30 % of a water miscible organic solvent and (iii) 0-10 % water.
(FR)
L'invention porte sur des compositions non corrosives de nettoyage servant à éliminer d'un substrat les résidus de photorésist et de gravure au plasma. Ladite composition comprend en poids: (i) 30-70 % d'hydroxy-(alkyle inférieur)-hydrazine; (ii) 70-30 % d'un solvant organique miscible à l'eau, et (iii) 0-10 % d'eau.
Latest bibliographic data on file with the International Bureau