Processing

Please wait...

Settings

Settings

1. WO2000039550 - RESONANT SENSOR

Publication Number WO/2000/039550
Publication Date 06.07.2000
International Application No. PCT/SE1999/002468
International Filing Date 22.12.1999
Chapter 2 Demand Filed 10.07.2000
IPC
G01L 9/00 2006.01
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
CPC
G01L 9/0016
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements
0001Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
0008using vibrations
0016of a diaphragm
G01L 9/0017
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements
0001Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
0008using vibrations
0016of a diaphragm
0017Optical excitation or measuring
G01L 9/0042
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements
0041Transmitting or indicating the displacement of flexible diaphragms
0042Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
Applicants
  • RADI MEDICAL SYSTEMS AB [SE/SE]; Palmbladsgatan 10 S-754 50 Uppsala, SE
Inventors
  • STEMME, Göran; SE
  • KÄLVESTEN, Edvard; SE
Agents
  • LINDGREN, Anders; Dr Ludwig Brann Patentbyrå AB Box 1344 S-751 43 Uppsala, SE
Priority Data
09/219,79423.12.1998US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) RESONANT SENSOR
(FR) CAPTEUR RESONANT
Abstract
(EN)
A resonant microbeam pressure sensor is disclosed, comprising a microbeam suspended in a diaphragm in at least one point by suspension elements. Pressure applied to the diaphragm will cause the resonance frequency of the beam to shift. This shift is detectable and proportional to the pressure. The device is manufactured by surface micromachining.
(FR)
La présente invention concerne un capteur à pression à microfaisceau résonant, comprenant un microfaisceau suspendu à un diaphragme, au moins par un côté, par des éléments de suspension. La pression exercée sur le diaphragme fait varier la fréquence de résonance du faisceau. Cette variation est détectable et proportionnelle à la pression. Le dispositif est fabriqué par micro-usinage de surface.
Also published as
Latest bibliographic data on file with the International Bureau