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1. WO2000037913 - MULTIPLE ELEMENT PRESSURE SENSOR

Publication Number WO/2000/037913
Publication Date 29.06.2000
International Application No. PCT/US1999/028531
International Filing Date 02.12.1999
Chapter 2 Demand Filed 12.07.2000
IPC
G01L 9/00 2006.01
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
G01L 9/06 2006.01
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
02by making use of variations in ohmic resistance, e.g. of potentiometers
06of piezo-resistive devices
CPC
G01L 9/0054
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements
0041Transmitting or indicating the displacement of flexible diaphragms
0051using variations in ohmic resistance
0052of piezoresistive elements
0054integral with a semiconducting diaphragm
G01L 9/06
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements
02by making use of variations in ohmic resistance, e.g. of potentiometers, ; , i.e. electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
06of piezo-resistive devices
Applicants
  • MOTOROLA INC. [US]/[US]
Inventors
  • CZARNOCKI, Walter
Agents
  • CUNNINGHAM, Gary, J.
Priority Data
09/218,87722.12.1998US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) MULTIPLE ELEMENT PRESSURE SENSOR
(FR) DETECTEUR DE PRESSION A PLUSIEURS ELEMENTS
Abstract
(EN)
A multiple element sensor for sensing pressure, the sensor has a substrate (201) with the diaphragm portion (203). Multiple sensing elements (205, 207, 209, 211) are each disposed on the diaphragm portion of the substrate. These sensing elements (205, 207, 209, 211) each have output terminals (231, 232, 233, 234, 235, 236, 237, 238) providing signals (371, 373, 377) indicative of the pressure. A combining circuit (217) has input terminals (337, 339, 341, 343) each coupled to the output terminals (231, 232, 233, 234, 235, 236, 237, 238) of each of the sensing elements (205, 207, 209, 211) respectively. The combining circuit (217) has a combined output terminal (219) for providing an output signal (345) dependent on the plurality of signals (371, 373, 375, 377). By fabricating this structure different pressure sensor ranges can be selected depending on how many of the sensing elements (205, 207, 209, 211) are selected by the combining circuit (217).
(FR)
Ce détecteur de pression à plusieurs éléments possède un substrat (201) pourvu d'une partie membrane (203). Plusieurs éléments de détection (205, 207, 209, 211) sont placés sur cette partie membrane du substrat. Chacun de ces éléments de détection (205, 207, 209, 211) possède des terminaux de sortie (231, 232, 233, 234, 235, 236, 237, 238) produisant des signaux (371, 373, 377) représentatifs de la pression. Un circuit combinateur (217) comporte des terminaux d'entrée (337, 339, 341, 343) couplés aux terminaux de sortie (231, 232, 233, 234, 235, 236, 237, 238) de chaque élément de détection (205, 207, 209, 211), respectivement. Ce circuit combinateur (217) possède un terminal combiné de sortie (219) produisant des signaux (345) dépendants de la pluralité de signaux (371, 373, 375, 377). La mise en place de cette structure permet de sélectionner différentes gammes de capteur de pression en fonction du nombre d'éléments de détection (205, 207, 209, 211) sélectionnés par le circuit combinateur (217).
Also published as
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