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1. WO2000033359 - SPECIMEN HOLDING ROBOTIC ARM END EFFECTOR

Publication Number WO/2000/033359
Publication Date 08.06.2000
International Application No. PCT/US1999/028737
International Filing Date 02.12.1999
Chapter 2 Demand Filed 15.06.2000
IPC
H01L 21/683 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683for supporting or gripping
CPC
H01L 21/6838
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
683for supporting or gripping
6838with gripping and holding devices using a vacuum; Bernoulli devices
H01L 21/68707
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
683for supporting or gripping
687using mechanical means, e.g. chucks, clamps or pinches
68707the wafers being placed on a robot blade, or gripped by a gripper for conveyance
Y10S 414/141
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
414Material or article handling
135Associated with semiconductor wafer handling
141includes means for gripping wafer
Y10S 700/90
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
700Data processing: generic control systems or specific applications
90Special robot structural element
Y10T 74/20317
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
74Machine element or mechanism
20Control lever and linkage systems
20207Multiple controlling elements for single controlled element
20305Robotic arm
20317including electric motor
Applicants
  • KENSINGTON LABORATORIES, INC. [US]/[US] (AllExceptUS)
  • BACCHI, Paul [US]/[US] (UsOnly)
  • FILIPSKI, Paul, S. [US]/[US] (UsOnly)
Inventors
  • BACCHI, Paul
  • FILIPSKI, Paul, S.
Agents
  • ANGELLO, Paul, S.
  • FEAKINS, Graham Allan
Priority Data
09/204,74702.12.1998US
09/312,34314.05.1999US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) SPECIMEN HOLDING ROBOTIC ARM END EFFECTOR
(FR) ORGANE EFFECTEUR D'EXTREMITE DE BRAS DE ROBOT POUR MAINTIEN DE SPECIMENS
Abstract
(EN)
Robot arm (16) end effectors (10, 110, 210) of this invention rapidly and cleanly transfer semiconductor wafers (12) between a wafer cassette (14) and a processing station. The end effectors include proximal and distal rest pads (24, 26, 124, 126) having pad and backstop portions (32, 34, 132, 134) that support and grip the wafer either by wafer peripheral edge contact or within an annular exclusion zone (30) that extends inward from a peripheral edge of the wafer. An active contact point (50, 150, 222) is movable by a vacuum actuated piston (52, 152) between a retracted wafer-loading position and an extended position that urges the wafer against the distal rest pads to grip the wafer at its edge or within the exclusion zone. The end effector further includes fiber optic light transmission sensors (90, 102, 202, 214) for determining various wafer surface, edge, thickness, tilt, and location parameters. The sensors provide robot arm extension and elevation positioning data supporting methods of rapidly and accurately placing and retrieving a wafer from among a stack of closely spaced wafers stored in the wafer cassette. The methods effectively prevent accidental contact between the end effector and the wafers while effecting clean, secure gripping of the wafer at its edge or within its exclusion zone.
(FR)
les organes effecteurs d'extrémité (10, 110, 210) du bras de robot(16) selon cette invention permettent de transférer rapidement et proprement des tranches de semi-conducteurs (812) entre une caissette de tranches (14) et un poste de transformation. Les organes effecteurs comprennent des patins d'appui proximal et distal (24, 26, 124, 126) dont les parties patin et butée arrière (32, 34, 132, 134) soutiennent et maintiennent la tranche par son bord périphérique. Un point de contact actif (50, 150, 222) peut être déplacé au moyen d'un piston à dépression (52, 152) entre une position de rappel correspondant au chargement de la tranche et une position sortie dans laquelle la tranche est amenée contre les patins d'appui distaux et saisie par son bord ou dans sa zone d'exclusion. L'organe effecteur comporte par ailleurs des capteurs phototransmetteurs à fibre optique (90, 102, 202, 214) pour la détermination de divers paramètres en rapport avec la surface, le bord, l'épaisseur, l'inclinaison et l'emplacement de la tranche. Ces capteurs fournissent des données relatives à l'extension et à l'élévation du bras de robot et, par là, rendent possible des méthodes rapides et précises de positionnement de la tranche et de sa saisie dans une cassette remplie de tranches étroitement rangées. Ces procédés excluent tout contact accidentel entre l'organe effecteur et les tranches tout en garantissant une prise propre et sure de la dite tranche par son bord ou par sa zone d'exclusion.
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