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1. WO2000033040 - BOLOMETER WITH A ZINC OXIDE BOLOMETER ELEMENT

Publication Number WO/2000/033040
Publication Date 08.06.2000
International Application No. PCT/KR1998/000382
International Filing Date 27.11.1998
Chapter 2 Demand Filed 27.06.2000
IPC
G01J 5/20 2006.01
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
5Radiation pyrometry
10using electric radiation detectors
20using resistors, thermistors or semiconductors sensitive to radiation
CPC
G01J 5/20
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
5Radiation pyrometry
10using electric radiation detectors
20using resistors, thermistors or semiconductors sensitive to radiation
H01L 27/14649
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
27Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
14including semiconductor components sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
144Devices controlled by radiation
146Imager structures
14643Photodiode arrays; MOS imagers
14649Infra-red imagers
Applicants
  • DAEWOO ELECTRONICS CO., LTD. [KR]/[KR]
Inventors
  • YONG, Yoon, Joong
Agents
  • JANG, Seong, Ku
Priority Data
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) BOLOMETER WITH A ZINC OXIDE BOLOMETER ELEMENT
(FR) BOLOMETRE AVEC ELEMENT BOLOMETRIQUE A L'OXYDE DE ZINC
Abstract
(EN)
An inventive infra-red bolometer (200) includes a zinc oxide bolometer element to obtain a stability in the high-temperature process and a high sensitivity. The bolometer comprises an active matrix level (210), a support level (220), a pair of posts (260) and an absorption level (230). The active matrix level (210) includes a substrate (212) having an integrated circuit, a pair of connecting terminals (274) and a protective layer (216) covering the substrate. The support level (220) includes a pair of bridges (240), each of the bridges (240) being provided with a conduction line (255) formed on top thereof, wherein one end of the conduction line (255) is electrically connected to the respective connecting terminal (214). The absorption level (230) includes a zinc oxide (ZnOx) bolometer element (285) surrounded by an absorber (295). Each of the posts (260) includes an electrical conduit (262) surrounded by an insulating material (264) and is placed between the absorber and the bridge, in such a way that the zinc oxide bolometer element (285) is electrically connected to the integrated circuit through the electrical conduit (262), the conduction line (255) and the connecting terminal (214).
(FR)
L'invention concerne un bolomètre (200) à infrarouge comprenant un élément bolométrique à l'oxyde de zinc permettant d'établir une stabilité dans le processus haute température ainsi qu'une sensibilité élevée. Ce bolomètre comprend un niveau (210) à matrice active, un niveau (220) de support, deux pions (260) et un niveau (230) d'absorption. Le niveau (210) à matrice active comporte un substrat (212) comprenant un circuit intégré, deux bornes (274) de connexion et une couche (216) protectrice recouvrant le substrat. Le niveau (220) de support comprend deux ponts (240) présentant chacun une ligne (255) de conduction formée sur leur sommet, une extrémité de cette ligne (255) de conduction étant électriquement connectée à la borne (214) de connexion respective. Le niveau (230) d'absorption comprend un élément (285) bolométrique à l'oxyde de zinc (ZnOx) entouré d'un absorbeur (295). Chaque pion (260) comprend un conduit (262) électrique entouré d'un matériau (264) isolant et est placé entre l'absorbeur et le pont de telle manière que l'élément (285) bolométrique à l'oxyde de zinc est électriquement connecté au circuit intégré par la conduite (262) électrique, la ligne (255) de conduction et la borne (214) de connexion.
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