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Machine translation
1. (WO2000025981) UNPOLISHED WORK HOLDING BOARD AND PRODUCTION METHOD THEREOF AND WORK POLISHING METHOD AND DEVICE
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2000/025981    International Application No.:    PCT/JP1999/005852
Publication Date: 11.05.2000 International Filing Date: 22.10.1999
IPC:
B05D 3/04 (2006.01), B24B 37/30 (2012.01), B24B 7/00 (2006.01), B25B 11/00 (2006.01), H01L 21/683 (2006.01), B05D 1/32 (2006.01)
Applicants: SHIN-ETSU HANDOTAI CO., LTD. [JP/JP]; 4-2, Marunouchi 1-chome Chiyoda-ku Tokyo 100-0005 (JP) (For All Designated States Except US).
MASUMURA, Hisashi [JP/JP]; (JP) (For US Only).
TANAKA, Kouichi [JP/JP]; (JP) (For US Only).
SUZUKI, Fumio [JP/JP]; (JP) (For US Only).
MORITA, Kouzi [JP/JP]; (JP) (For US Only).
OKAMURA, Kouichi [JP/JP]; (JP) (For US Only).
TOYAMA, Naotaka [JP/JP]; (JP) (For US Only)
Inventors: MASUMURA, Hisashi; (JP).
TANAKA, Kouichi; (JP).
SUZUKI, Fumio; (JP).
MORITA, Kouzi; (JP).
OKAMURA, Kouichi; (JP).
TOYAMA, Naotaka; (JP)
Agent: YOSHIMIYA, Mikio; Uenosansei Building 4F 6-4, Motoasakusa 2-chome Taito-ku Tokyo 111-0041 (JP)
Priority Data:
10/310121 30.10.1998 JP
Title (EN) UNPOLISHED WORK HOLDING BOARD AND PRODUCTION METHOD THEREOF AND WORK POLISHING METHOD AND DEVICE
(FR) PLAN NON POLI DE MAINTIEN/TRAVAIL ET SON PROCEDE DE FABRICATION ; TECHNIQUE ET DISPOSITIF DE POLISSAGE
Abstract: front page image
(EN)An unpolished work holding board having a high-precision work holding surface obtained by improving materials for the holding board body of an unpolished work holding board which vacuum-sucks/holds a work and for a resin coating spread on a work holding surface, and by developing a resin coating method which does not close with resin through holes in the holding board body; and a production method thereof. An unpolished work holding board provided with a work holding board body having many through holes for vacuum-sucking/holding a work, wherein the holding surface of the holding board body is covered with a coating formed by heat-curing a thermosetting resin spread on the holding surface and the surface of the coating is polished; and a production method thereof.
(FR)La présente invention concerne un plan de maintien de pièces non poli avec surface de travail de haute précision grâce à l'emploi de matériaux améliorés pour le corps du plan de maintien. Ce plan aspire/maintient pas dépression la pièce à ouvrer. L'invention concerne également une méthode d'application sur le plan de maintien, et l'application proprement dite, d'une couche de résine qui n'obture pas les trous traversants du corps du plan de maintien ainsi que le procédé de fabrication de cette résine. L'invention concerne un plan de maintien non poli avec un corps présentant des trous traversants pour l'aspiration/maintien par dépression, plan dont la surface du plan de maintien est recouverte d'une couche de résine thermodurcissable ultérieurement polie.
Designated States: KR, US.
European Patent Office (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)