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1. WO2000024029 - X-RAY IRRADIATION APPARATUS INCLUDING AN X-RAY SOURCE PROVIDED WITH A CAPILLARY OPTICAL SYSTEM

Publication Number WO/2000/024029
Publication Date 27.04.2000
International Application No. PCT/EP1999/007034
International Filing Date 22.09.1999
IPC
G03F 7/20 2006.1
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20Exposure; Apparatus therefor
G21K 1/06 2006.1
GPHYSICS
21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
KTECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
1Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
06using diffraction, refraction, or reflection, e.g. monochromators
G21K 5/04 2006.1
GPHYSICS
21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
KTECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
5Irradiation devices
04with beam-forming means
H01J 35/18 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
35X-ray tubes
02Details
16Vessels; Containers; Shields associated therewith
18Windows
H05G 1/02 2006.1
HELECTRICITY
05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
GX-RAY TECHNIQUE
1X-ray apparatus involving X-ray tubes; Circuits therefor
02Constructional details
CPC
B82Y 10/00
BPERFORMING OPERATIONS; TRANSPORTING
82NANOTECHNOLOGY
YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
10Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
G03F 7/70166
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR;
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
70Exposure apparatus for microlithography
70058Mask illumination systems
7015Details of optical elements
70166Capillary or channel elements, e.g. nested EUV mirrors
G21K 1/06
GPHYSICS
21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
KTECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
1Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
06using diffraction, refraction or reflection, e.g. monochromators
G21K 5/04
GPHYSICS
21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
KTECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
5Irradiation devices
04with beam-forming means
H01J 35/18
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
35X-ray tubes
02Details
16Vessels; Containers; Shields associated therewith
18Windows
H05G 1/02
HELECTRICITY
05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
GX-RAY TECHNIQUE
1X-ray apparatus involving X-ray tubes; Circuits therefor
02Constructional details
Applicants
  • KONINKLIJKE PHILIPS ELECTRONICS N.V. [NL]/[NL]
Inventors
  • VAN SPRANG, Hendrik, A.
Agents
  • BAKKER, Hendrik
Priority Data
98203546.121.10.1998EP
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) X-RAY IRRADIATION APPARATUS INCLUDING AN X-RAY SOURCE PROVIDED WITH A CAPILLARY OPTICAL SYSTEM
(FR) APPAREIL A RAYONNEMENT X COMPRENANT UNE SOURCE DE RAYONS X DOTEE D'UN SYSTEME OPTIQUE CAPILLAIRE
Abstract
(EN) Generally known conventional X-ray tubes include a window opening which is covered by an X-ray transparent X-ray window which is usually made of beryllium. A significant absorption of X-rays of comparatively long wavelength, for example of the order of magnitude of from 1 nm to 10 nm, occurs in such windows. According to the invention, a bundle of X-ray conducting capillary tubes (46) is connected to the window opening of the X-ray tube, the other end (48) of the bundle being provided with a very thin X-ray window (50) which seals the interior of the capillary tubes (46), being in vacuum contact with the vacuum space of the X-ray tube, from the environment in a vacuumtight manner.
(FR) En général, les tubes à rayons X, classiques, comprennent une ouverture de fenêtre, recouverte par une fenêtre de rayonnement transparente aux rayons X et habituellement réalisée en béryllium. De telles fenêtres absorbent de manière importante les rayons X de longueur d'onde relativement grande, par exemple dont l'amplitude est comprise entre 1 et 10 nm. Selon l'invention, un faisceau de tubes capillaires (46) acheminant les rayons X est relié à l'ouverture de la fenêtre du tube à rayons X, l'autre extrémité (48) du faisceau étant dotée d'une fenêtre à rayon X très mince (50), laquelle, par rapport à l'environnement, scelle sous vide l'intérieur des tubes capillaires (46), par suite du contact sous vide avec l'espace sous vide du tube à rayons X.
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