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1. WO1999058929 - WAVELENGTH-DEPENDENT SURFACE CONTOUR MEASUREMENT SYSTEM AND METHOD

Publication Number WO/1999/058929
Publication Date 18.11.1999
International Application No. PCT/IL1999/000247
International Filing Date 11.05.1999
Chapter 2 Demand Filed 08.12.1999
IPC
G01B 11/24 2006.01
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
G01S 7/481 2006.01
GPHYSICS
01MEASURING; TESTING
SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
7Details of systems according to groups G01S13/, G01S15/, G01S17/127
48of systems according to group G01S17/58
481Constructional features, e.g. arrangements of optical elements
G01S 17/87 2006.01
GPHYSICS
01MEASURING; TESTING
SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
17Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
87Combinations of systems using electromagnetic waves other than radio waves
G01S 17/89 2006.01
GPHYSICS
01MEASURING; TESTING
SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
17Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
88Lidar systems, specially adapted for specific applications
89for mapping or imaging
CPC
G01B 11/24
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
G01S 17/87
GPHYSICS
01MEASURING; TESTING
SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
17Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
87Combinations of systems using electromagnetic waves other than radio waves
G01S 17/89
GPHYSICS
01MEASURING; TESTING
SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
17Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
88Lidar systems specially adapted for specific applications
89for mapping or imaging
G01S 7/4811
GPHYSICS
01MEASURING; TESTING
SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
7Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
48of systems according to group G01S17/00
481Constructional features, e.g. arrangements of optical elements
4811common to transmitter and receiver
Applicants
  • METROPTIC TECHNOLOGIES, LTD. [IL]/[IL] (AllExceptUS)
  • BEN-DOV, Shimshon [IL]/[IL] (UsOnly)
  • LANZET, Igal [IL]/[IL] (UsOnly)
  • KUPERMAN, Igor [IL]/[IL] (UsOnly)
Inventors
  • BEN-DOV, Shimshon
  • LANZET, Igal
  • KUPERMAN, Igor
Agents
  • SELIGSOHN & GABRIELI
Priority Data
09/076,51412.05.1998US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) WAVELENGTH-DEPENDENT SURFACE CONTOUR MEASUREMENT SYSTEM AND METHOD
(FR) PROCEDE ET SYSTEME DE MESURE DU CONTOUR D'UNE SURFACE EN FONCTION DE LA LONGUEUR D'ONDE
Abstract
(EN)
An optical metrology system for measuring a contour of a workpiece surface. The system includes a multi-wavelength light projector that projects a wavelength-varying collimated light beam onto the surface of the workpiece. The collimated light beam has a plurality of substantially parallel light rays, each of which has a predetermined wavelength. The wavelength of the plurality of light rays varies in a predetermined manner across a width of the collimated light beam. A wavelength-discriminating detector determines an intensity of light reflected from the workpiece surface and detects wavelength-specific characteristics of the received reflected light. Significantly, the wavelength-specific characteristics of the reflected light are related to the distance of the workpiece surface from the detector.
(FR)
L'invention porte sur un système de métrologie optique destiné à mesurer le contour de la surface d'une pièce. Ce système comprend un projecteur de lumière à plusieurs longueurs d'onde qui projette un faisceau lumineux collimaté de longueur d'onde variable sur la surface de la pièce. Le faisceau lumineux collimaté comporte une pluralité de rayons de lumière pratiquement parallèles, chacun d'eux ayant une longueur d'onde prédéterminée. La longueur d'onde de la pluralité de ces rayons lumineux varie d'une manière prédéterminée dans une largeur du faisceau collimaté. Un détecteur de discrimination de la longueur d'onde détermine l'intensité de lumière renvoyée par la surface de la pièce et détecte des caractéristiques spécifiques de la longueur d'onde de la lumière réfléchie, reçue. De manière significative, les caractéristiques spécifiques de la longueur d'onde de la lumière réfléchie sont relatives à la distance de la surface de la pièce partant du détecteur.
Also published as
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