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1. WO1999057441 - TURBO-MOLECULAR PUMP WITH METAL MATRIX COMPOSITE ROTOR AND STATOR

Publication Number WO/1999/057441
Publication Date 11.11.1999
International Application No. PCT/US1999/009934
International Filing Date 04.05.1999
Chapter 2 Demand Filed 02.12.1999
IPC
F04D 19/04 2006.01
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
DNON-POSITIVE-DISPLACEMENT PUMPS
19Axial-flow pumps specially adapted for elastic fluids
02Multi-stage pumps
04specially adapted to the production of a high vacuum, e.g. molecular pumps
F04D 29/02 2006.01
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
DNON-POSITIVE-DISPLACEMENT PUMPS
29Details, component parts, or accessories
02Selection of particular materials
CPC
F04D 19/04
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
DNON-POSITIVE-DISPLACEMENT PUMPS
19Axial-flow pumps
02Multi-stage pumps
04specially adapted to the production of a high vacuum, e.g. molecular pumps
F04D 29/023
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
DNON-POSITIVE-DISPLACEMENT PUMPS
29Details, component parts, or accessories
02Selection of particular materials
023especially adapted for elastic fluid pumps
F05D 2300/122
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
DINDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
2300Materials; Properties thereof
10Metals, alloys or intermetallic compounds
12Light metals
122Beryllium
F05D 2300/6032
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
DINDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
2300Materials; Properties thereof
60Properties or characteristics given to material by treatment or manufacturing
603Composites; e.g. fibre-reinforced
6032Metal matrix composites [MMC]
Applicants
  • APPLIED MATERIALS, INC. [US]/[US]
Inventors
  • ONO, Masanori
Agents
  • BERNADICOU, Michael, A.
Priority Data
09/073,89906.05.1998US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) TURBO-MOLECULAR PUMP WITH METAL MATRIX COMPOSITE ROTOR AND STATOR
(FR) POMPE TURBOMOLECULAIRE COMPORTANT UN ROTOR ET UN STATOR EN MATERIAU COMPOSITE A MATRICE METALLIQUE
Abstract
(EN)
The invention provides a vacuum processing system comprising a vacuum processing chamber and a turbo-molecular pump having a rotor and/or stator comprised of metal matrix composites. Another aspect of the invention provides a turbo-molecular pump having a rotor and/or a stator comprised of metal matrix composites. Because metal matrix composites are able to withstand higher operating temperatures than the aluminum alloys currently used in rotors and stators, the rotor vanes and the stator vanes that are made of metal matrix composites can provide a higher exhaust capacity with faster rotor rotations.
(FR)
L'invention concerne un système de traitement à vide comportant une enceinte de traitement à vide et une pompe turbomoléculaire comportant un rotor et/ou un stator constitué(s) de matériaux composites à matrice métallique. Un autre aspect de l'invention concerne une pompe turbomoléculaire comportant un rotor et/ou un stator constitués de matériaux composites à matrice métallique. Les matériaux composites à matrice métallique pouvant résister à des températures de fonctionnement plus élevées que des alliages d'aluminium utilisés actuellement dans des rotors et des stators, les aubes de rotor et de stator en matériaux composites à matrice métallique peuvent fournir une capacité d'échappement plus élevée et des rotations plus rapides de rotor.
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