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1. (WO1999054786) ELASTOMERIC MASK AND USE IN FABRICATION OF DEVICES, INLCUDING PIXELATED ELECTROLUMINESCENT DISPLAYS
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/1999/054786 International Application No.: PCT/US1999/008623
Publication Date: 28.10.1999 International Filing Date: 20.04.1999
Chapter 2 Demand Filed: 28.10.1999
IPC:
B41C 1/14 (2006.01) ,B05D 1/32 (2006.01) ,G03F 1/00 (2012.01) ,G03F 7/00 (2006.01) ,G03F 7/12 (2006.01) ,H01L 27/32 (2006.01) ,H01L 51/50 (2006.01) ,H05B 33/10 (2006.01)
B PERFORMING OPERATIONS; TRANSPORTING
41
PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
C
PROCESSES FOR THE MANUFACTURE OR REPRODUCTION OF PRINTING SURFACES
1
Forme preparation
14
for stencil printing or silk-screen printing
B PERFORMING OPERATIONS; TRANSPORTING
05
SPRAYING OR ATOMISING IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
D
PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
1
Processes for applying liquids or other fluent materials
32
using means for protecting parts of a surface not to be coated, e.g. using stencils, resists
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
1
Originals for photomechanical production of textured or patterned surfaces, e.g. masks, photo-masks or reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
12
Production of screen printing forms or similar printing forms, e.g. stencils
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
27
Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
28
including components using organic materials as the active part, or using a combination of organic materials with other materials as the active part
32
with components specially adapted for light emission, e.g. flat-panel displays using organic light-emitting diodes
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
51
Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
50
specially adapted for light emission, e.g. organic light emitting diodes (OLED) or polymer light emitting devices (PLED)
H ELECTRICITY
05
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
B
ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
33
Electroluminescent light sources
10
Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
Applicants:
JACKMAN, Rebecca, J. [GB/US]; US (UsOnly)
DUFFY, David, C. [GB/US]; US (UsOnly)
WHITESIDES, George, M. [US/US]; US (UsOnly)
VAETH, Kathleen, M. [US/US]; US (UsOnly)
JENSEN, Klavs, F. [US/US]; US (UsOnly)
PRESIDENT AND FELLOWS OF HARVARD COLLEGE [US/US]; Holyoke Center Suite 727 1350 Massachusetts Avenue Cambridge, MA 02138, US (AllExceptUS)
MASSACHUSETTS INSTITUTE OF TECHNOLOGY [US/US]; 77 Massachusetts Avenue Cambridge, MA 02139, US (AllExceptUS)
Inventors:
JACKMAN, Rebecca, J.; US
DUFFY, David, C.; US
WHITESIDES, George, M.; US
VAETH, Kathleen, M.; US
JENSEN, Klavs, F.; US
Agent:
OYER, Timothy, J.; Wolf, Greenfield & Sacks, P.C. 600 Atlantic Avenue Boston, MA 02210, US
Priority Data:
09/063,74221.04.1998US
Title (EN) ELASTOMERIC MASK AND USE IN FABRICATION OF DEVICES, INLCUDING PIXELATED ELECTROLUMINESCENT DISPLAYS
(FR) MASQUE ELASTOMERE ET SON UTILISATION DANS LA FABRICATION DE DISPOSITIFS, DONT DES AFFICHEURS ELECTROLUMINESCENTS PIXELISES
Abstract:
(EN) An elastomeric mask is provided that allows deposition of a variety of materials through mask openings. The mask seals effectively against substrate surfaces, allowing simple deposition from fluid phase, gas phase, and the like or removal of material using gaseous or liquid etchants. The mask then can be simply peeled from the surface of the substrate leaving the patterned material behind. Multi-layered mask techniques are described in which openings in an upper mask allow selected openings of a lower mask to remain unshielded, while other openings of the lower mask are shielded. A first deposition step, followed by re-orientation of the upper mask to expose a different set of lower mask openings, allows selective deposition of different materials in different openings of the lower mask. Pixelated organic electroluminescent devices are provided via the described technique.
(FR) L'invention concerne un masque élastomère permettant le dépôt d'une variété de matériaux par les ouvertures du masque. Le masque vient en contact étanche efficace contre les surfaces du substrat, ce qui permet le dépôt simple à partir de phase gazeuse ou liquide et similaire ou le retrait de matériaux au moyen d'agents de gravure gazeux ou liquides. Le masque peut ensuite être simplement pelés de la surface du substrat, seul le matériau à motif subsistant. Des techniques de masquage multicouche sont décrites, dans lesquelles des ouvertures présentes dans un masque supérieur permettent aux ouvertures sélectionnées d'un masque inférieur de rester exposées, alors que d'autres ouvertures du masque inférieur reste protégées. Une première étape de dépôt, suivie de la réorientation du masque supérieur pour permettre l'exposition d'un ensemble différent d'ouvertures du masque inférieur, permet le dépôt sélectif de différents matériaux dans différentes ouvertures du masque inférieur. Des dispositifs organiques électroluminescents pixélisés sont produits au moyen de la technique décrite.
Designated States: CA, JP, US
European Patent Office (EPO) (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE)
Publication Language: English (EN)
Filing Language: English (EN)