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Machine translation
1. (WO1999039333) AIR-CONDITIONER, PARTITION AND EXPOSURE APPARATUS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/1999/039333    International Application No.:    PCT/JP1999/000345
Publication Date: 05.08.1999 International Filing Date: 27.01.1999
Chapter 2 Demand Filed:    25.08.1999    
IPC:
G03F 7/20 (2006.01), G10K 11/16 (2006.01), G10K 11/168 (2006.01), G10K 11/172 (2006.01)
Applicants: NIKON CORPORATION [JP/JP]; 2-3, Marunouchi 3-chome Chiyoda-ku Tokyo 100-8331 (JP) (For All Designated States Except US).
ASAHI KOGYOSHA CO., LTD. [JP/JP]; 25-7, Hamamatsucho 1-chome Minato-ku Tokyo 105-0013 (JP) (JP only).
AKIYAMA, Kyoichi [JP/JP]; (JP) (For US Only).
KOU, Gentoku [JP/JP]; (JP) (For US Only).
OGAWA, Makoto [JP/JP]; (JP) (For US Only).
HACHISUKA, Masaru [JP/JP]; (JP) (For US Only).
OZAKI, Takashi [JP/JP]; (JP) (For US Only).
OGAWA, Yoshinori [JP/JP]; (JP) (For US Only).
TAKEUCHI, Isamu [JP/JP]; (JP) (For US Only)
Inventors: AKIYAMA, Kyoichi; (JP).
KOU, Gentoku; (JP).
OGAWA, Makoto; (JP).
HACHISUKA, Masaru; (JP).
OZAKI, Takashi; (JP).
OGAWA, Yoshinori; (JP).
TAKEUCHI, Isamu; (JP)
Agent: HIRAKI, Yusuke; Toranomon No. 5 Mori Building 3rd floor 17-1, Toranomon 1-chome Minato-ku Tokyo 105-0001 (JP)
Priority Data:
10/15884 28.01.1998 JP
Title (EN) AIR-CONDITIONER, PARTITION AND EXPOSURE APPARATUS
(FR) CONDITIONNEUR D'AIR, CLOISON ET DISPOSITIF D'EXPOSITION
Abstract: front page image
(EN)An exposure apparatus capable of minimizing low-frequency noise intruding into the interior of a chamber from the outside, wherein a partition of the chamber comprises a structure formed by sandwiching a ceramic honeycomb structural material (18) between two steel or aluminum plates (16), the partition having a very high sound-proofing effect against low-frequency noise owing to its high rigidity.
(FR)La présente invention concerne un dispositif d'exposition capable de minimiser le bruit basse fréquence pénétrant malencontreusement à l'intérieur d'une chambre en provenance de l'extérieur. En l'occurrence, une cloison de la chambre comprend une structure formée par le montage en sandwich d'un matériau céramique à structure nid d'abeille (18) entre deux tôles d'acier ou d'aluminium (16). Du fait de sa rigidité élevée, cette cloison constitue un très bon insonorisant contre le bruit basse fréquence.
Designated States: AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, CA, CH, CN, CU, CZ, DE, DK, EE, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MD, MG, MK, MN, MW, MX, NO, NZ, PL, PT, RO, RU, SD, SE, SG, SI, SK, SL, TJ, TM, TR, TT, UA, UG, US, UZ, VN, YU, ZW.
African Regional Intellectual Property Organization (GH, GM, KE, LS, MW, SD, SZ, UG, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)