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Machine translation
1. (WO1999039246) PROCESS FOR PRODUCING A PHOTORESIST COMPOSITION HAVING A REDUCED TENDENCY TO PRODUCE PARTICLES
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/1999/039246    International Application No.:    PCT/EP1999/000343
Publication Date: 05.08.1999 International Filing Date: 20.01.1999
Chapter 2 Demand Filed:    19.08.1999    
IPC:
G03F 7/023 (2006.01)
Applicants: CLARIANT INTERNATIONAL LTD. [CH/CH]; Rothausstrasse 61, CH-4132 Muttenz 1 (CH)
Inventors: OBERLANDER, Joseph, E.; (US).
RAHMAN, M., Dalil; (US).
COOK, Michelle, M.; (US).
NELSON, William, C.; (US)
Agent: HÜTTER, Klaus; Clariant GmbH, Patente, Marken, Lizenzen, Am Unisys-Park 1, D-65843 Sulzbach (DE)
Priority Data:
09/017,083 02.02.1998 US
Title (EN) PROCESS FOR PRODUCING A PHOTORESIST COMPOSITION HAVING A REDUCED TENDENCY TO PRODUCE PARTICLES
(FR) PROCEDE DE PRODUCTION D'UN AGENT PHOTORESISTANT MOINS ENCLIN A PRODUIRE DES PARTICULES
Abstract: front page image
(EN)A process is provided for producing a photoresist composition having a reduced tendency to produce particles wherein the photoresist composition is filtered through a filter having a rating of from about 0.05 $g(m)m to about 0.50 $g(m)m; treated with an acidic ion exchange resin and heated to a temperature of from about 35 °C to about 90 °C; and again filtered through a filter having a rating of from about 0.05 $g(m)m to about 0.50 $g(m)m.
(FR)L'invention porte sur un procédé de production d'un agent photorésistant moins enclin à produire des particules consistant à le faire passer dans un filtre d'un calibre d'environ 0,05 $g(m)m à environ 0,50 $g(m)m, à le traiter par une résine échangeuse d'ions et à le porter à une température comprise entre environ 35 °C et environ 90 °C, puis à le refiltrer dans un filtre d'un calibre d'environ 0,05 $g(m)m à environ 0,50 $g(m)m.
Designated States: CN, JP, KR, SG.
European Patent Office (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE).
Publication Language: English (EN)
Filing Language: English (EN)