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Machine translation
1. (WO1999038910) SOLVENT SYSTEMS FOR LOW DIELECTRIC CONSTANT POLYMERIC MATERIALS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/1999/038910    International Application No.:    PCT/US1999/002156
Publication Date: 05.08.1999 International Filing Date: 01.02.1999
Chapter 2 Demand Filed:    02.09.1999    
IPC:
C08J 3/09 (2006.01), H01L 21/312 (2006.01)
Applicants: ALLIEDSIGNAL, INC. [US/US]; 101 Columbia Road P.O. Box 2245 Morristown, NJ 07962-2245 (US)
Inventors: CHEN, Tian-An; (US).
LAU, Kreisler, S., Y.; (US).
ZHAO, Qiang; (US)
Agent: CRISS, Roger, H.; AlliedSignal Inc. Law Dept. (A. Olinger) 101 Columbia Road P.O. Box 2245 Morristown, NJ 07962-2245 (US)
Priority Data:
60/073,483 03.02.1998 US
09/235,141 21.01.1999 US
Title (EN) SOLVENT SYSTEMS FOR LOW DIELECTRIC CONSTANT POLYMERIC MATERIALS
(FR) SYSTEMES DE SOLVANT DESTINES A DES MATERIAUX POLYMERES A FAIBLE CONSTANTE DIELECTRIQUE
Abstract: front page image
(EN)A polymeric low dielectric constant solution includes a low dielectric constant polymer dissolved in an aromatic aliphatic ether solvent. The polymer preferably is a poly(arylene ether) and the solvent preferably is anisole, methylanisole, phenetole or mixtures thereof. A process for forming a dielectric film on a substrate by spin-coating the polymeric solution is also provided.
(FR)Une solution polymère à faible constante diélectrique comprend un polymère à faible constante diélectrique dissous dans un solvant d'éther aliphatique aromatique. Le polymère est de préférence un poly(arylène éther) et le solvant est de préférence l'anisole, le méthylanisole, le phénetole ou des mélanges de ces derniers. On décrit également un procédé de formation d'un film diélectrique sur un substrat au moyen de la centrifugation de la solution polymère.
Designated States: AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, CA, CH, CN, CU, CZ, DE, DK, EE, ES, FI, GB, GE, GH, GM, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MD, MG, MK, MN, MW, MX, NO, NZ, PL, PT, RO, RU, SD, SE, SG, SI, SK, SL, TJ, TM, TR, TT, UA, UG, UZ, VN, YU, ZW.
African Regional Intellectual Property Organization (GH, GM, KE, LS, MW, SD, SZ, UG, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)