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1. (WO1999008066) INTERFERENCE METHOD AND SYSTEM FOR MEASURING THE THICKNESS OF AN OPTICALLY-TRANSMISSIVE THIN LAYER FORMED ON A RELATIVELY PLANAR, OPTICALLY-REFLECTIVE SURFACE

Pub. No.:    WO/1999/008066    International Application No.:    PCT/US1998/015366
Publication Date: Fri Feb 19 00:59:59 CET 1999 International Filing Date: Tue Jul 28 01:59:59 CEST 1998
IPC: G01B 11/06
Applicants: MEDAR, INC.
YEMETS, Alexander
Inventors: YEMETS, Alexander
Title: INTERFERENCE METHOD AND SYSTEM FOR MEASURING THE THICKNESS OF AN OPTICALLY-TRANSMISSIVE THIN LAYER FORMED ON A RELATIVELY PLANAR, OPTICALLY-REFLECTIVE SURFACE
Abstract:
A non-contact, interference method and system (34) are provided for measuring the thickness of an optically-transmissive thin layer (28) formed on a relatively planar, optically-reflective surface by measuring the distance between interference fringes of inte rference patterns to obtain an absolute measurement of thickness of thin layer (28).