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Machine translation
1. (WO1999005759) WAVELENGTH SHIFT CORRECTION TECHNIQUE FOR A LASER
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/1999/005759    International Application No.:    PCT/US1998/012349
Publication Date: 04.02.1999 International Filing Date: 17.06.1998
Chapter 2 Demand Filed:    11.12.1998    
IPC:
G03F 7/20 (2006.01), H01S 3/13 (2006.01), H01S 3/225 (2006.01)
Applicants: CYMER, INC. [US/US]; 16750 Via Del Campo Court San Diego, CA 92127-1712 (US) (For All Designated States Except US).
EVERAGE, George, J. [US/US]; (US) (For US Only).
FOMENKOV, Igor V. [RU/US]; (US) (For US Only).
DAS, Palash, P. [US/US]; (US) (For US Only).
SANDSTROM, Richard, L. [US/US]; (US) (For US Only)
Inventors: EVERAGE, George, J.; (US).
FOMENKOV, Igor V.; (US).
DAS, Palash, P.; (US).
SANDSTROM, Richard, L.; (US)
Agent: ROSS, John, R.; Cymer, Inc. Legal Dept., MS 1-2A 16750 Via Del Campo Court San Diego, CA 92127-1712 (US)
Priority Data:
08/898,630 22.07.1997 US
Title (EN) WAVELENGTH SHIFT CORRECTION TECHNIQUE FOR A LASER
(FR) TECHNIQUE DE CORRECTION DE DECALAGE SPECTRAL POUR UN LASER
Abstract: front page image
(EN)A wavelength shift correction system for a laser system is provided for correcting wavelength chirps. This wavelength shift correction system includes a learning algorithm (44) that learns characteristics of a wavelength chirp from a laser (34) and a computer system (46) that executes the learning algorithm and provides wavelength correction control signals based on the learned characteristics to reduce the magnitude of the wavelength shift of the present wavelength chirp and subsequent wavelength chirps.
(FR)Système de correction de décalage spectral pour un système laser, qui permet de corriger les fluctuations de longueur d'onde. Ledit système de correction comprend un algorithme (44) qui apprend les caractéristiques d'une fluctuation de longueur d'onde provenant d'un laser (34) et un système informatique (46) qui exécute l'algorithme d'apprentissage et fournit des signaux de commande de correction de longueur d'onde sur la base des caractéristiques apprises pour réduire l'amplitude du décalage de la fluctuation de longueur d'onde en cours et des fluctuations ultérieures.
Designated States: AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, CA, CH, CN, CU, CZ, DE, DK, EE, ES, FI, GB, GE, GH, GM, GW, HU, ID, IL, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MD, MG, MK, MN, MW, MX, NO, NZ, PL, PT, RO, RU, SD, SE, SG, SI, SK, SL, TJ, TM, TR, TT, UA, UG, US, UZ, VN, YU, ZW.
African Regional Intellectual Property Organization (GH, GM, KE, LS, MW, SD, SZ, UG, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)