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1. (WO1998053362) FABRICATION SYSTEM, METHOD AND APPARATUS FOR MICROELECTROMECHANICAL DEVICES
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/1998/053362 International Application No.: PCT/US1998/010352
Publication Date: 26.11.1998 International Filing Date: 21.05.1998
Chapter 2 Demand Filed: 21.12.1998
IPC:
H01J 9/18 (2006.01) ,H01J 9/24 (2006.01) ,H01J 29/02 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
9
Apparatus or processes specially adapted for the manufacture of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
02
Manufacture of electrodes or electrode systems
18
Assembling together the component parts of electrode systems
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
9
Apparatus or processes specially adapted for the manufacture of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
24
Manufacture or joining of vessels, leading-in conductors, or bases
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
29
Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/113
02
Electrodes; Screens; Mounting, supporting, spacing, or insulating thereof
Applicants:
TINI ALLOY COMPANY [US/US]; 1621 Neptune Drive San Leandro, CA 94577, US
Inventors:
JOHNSON, A., David; US
BUSTA, Heinz, H.; US
NOWICKI, Ronald, S.; US
Agent:
BACKUS, Richard, E. ; Flehr, Hohbach, Test, Albritton & Herbert LLP Suite 3400 4 Embarcadero Center San Francisco, CA 94111-4187, US
Priority Data:
08/862,64923.05.1997US
Title (EN) FABRICATION SYSTEM, METHOD AND APPARATUS FOR MICROELECTROMECHANICAL DEVICES
(FR) SYSTEME, PROCEDE ET APPAREIL PERMETTANT DE FABRIQUER DES DISPOSITIFS MICROELECTROMECANIQUES
Abstract:
(EN) A fabrication system and method for producing microelectromechanical devices such as field-effect displays using thin-film technology. A spacer (40) is carried at its proximal end (48) on the surface of a substrate (12) having field-effect emitters with the spacer being enabled for tilting movement from a nested position to a deployed position which is orthogonal to the plane of the substrate. An actuator (42) is formed with one end connected to the substrate and another end connected to the spacer. The actuator is made of shape memory alloy material which contracts when heated through the material's phase-change transition temperature. Contraction of the actuator exerts a pulling force which tilts the spacer to the deployed position. A plurality of the spacers are distributed over the area of the display. A glass plate (16) having a phosphor-coated surface is fitted over the distal ends of the deployed spacers.
(FR) La présente invention concerne un système et un procédé de fabrication permettant de produire, au moyen de la technologie de couche mince, des dispositifs microélectromécaniques tels que des dispositifs d'affichage à effet de champ. Un élément d'écartement est supporté en son extrémité proximale sur la surface d'un substrat possédant des émetteurs à effet de champ, l'élément d'écartement pouvant basculer d'une position repliée jusque dans une position déployée orthogonale par rapport au plan du substrat. Un organe d'actionnement comprend une extrémité connectée au substrat et une extrémité connectée à l'élément d'écartement. L'organe d'actionnement est réalisé dans un alliage à mémoire de forme qui se contracte lorsqu'il est chauffé à la température de transition de changement de phase du matériau. En se contractant, l'organe d'actionnement exerce une force de traction sur l'élément d'écartement qui bascule alors dans sa position déployée. Plusieurs éléments d'écartement sont distribués sur toute la surface du dispositif d'affichage. Une plaque de verre à surface phosphorée est placée sur les extrémités distales des éléments d'écartement déployés.
Designated States: AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, CA, CH, CN, CU, CZ, DE, DK, EE, ES, FI, GB, GE, GH, GM, GW, HU, ID, IL, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MD, MG, MK, MN, MW, MX, NO, NZ, PL, PT, RO, RU, SD, SE, SG, SI, SK, SL, TJ, TM, TR, TT, UA, UG, UZ, VN, YU, ZW
African Regional Intellectual Property Organization (ARIPO) (GH, GM, KE, LS, MW, SD, SZ, UG, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
AU1998087567