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1. (WO1998053287) ABSORPTION TESTER FOR OPTICAL COMPONENTS
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/1998/053287 International Application No.: PCT/US1998/009639
Publication Date: 26.11.1998 International Filing Date: 11.05.1998
Chapter 2 Demand Filed: 02.12.1998
IPC:
G01N 21/17 (2006.01)
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
17
Systems in which incident light is modified in accordance with the properties of the material investigated
Applicants:
CYMER, INC. [US/US]; 16750 Via Del Campo Court San Diego, CA 92127-1712, US (AllExceptUS)
MORTON, Richard, George [US/US]; US (UsOnly)
Inventors:
MORTON, Richard, George; US
Agent:
ROSS, John, R.; Cymer, Inc. Legal Dept., MS 1-2A 16750 Via Del Campo Court San Diego, CA 92127-1712, US
Priority Data:
08/859,02120.05.1997US
Title (EN) ABSORPTION TESTER FOR OPTICAL COMPONENTS
(FR) APPAREIL DE CONTROLE DE L'ABSORPTION POUR ELEMENTS OPTIQUES
Abstract:
(EN) The preferred embodiment of the invention measures the temperature increase of a light-transmitting optical component to determine the optical absorption of the optical component. Accurately determining the optical absorption of light-transmitting optical components advantageously allows for the accurate and efficient selection of light transmitting optical components for use in an optical system. In one embodiment, an optical absorption tester (10) holds multiple optical components (14) and, for each optical component, the tester includes a temperature sensor (16) placed in contact with the optical component and a reference temperature sensor (18) placed in the vicinity of the optical component. In addition, the tester includes a motherboard (22) for supporting the temperature sensors having electrical connectors (23) leading to the temperature sensors.
(FR) Dans le mode de réalisation préféré de la présente invention, on mesure l'élevation de température d'un élément optique de transmission de la lumière pour en déterminer la capacité d'absorption optique. La détermination exacte de la capacité d'absorption optique d'un élément optique présente l'avantage de permettre une sélection précise et efficiente dudit élément en vue de son incorporation dans un système optique. Dans un mode réalisation, on décrit un appareil de contrôle de l'absorption (10) qui comprend plusieurs éléments optiques (14), un capteur thermique (16) placé au contact de chaque élément optique, et un senseur thermique à référence (18) disposé à proximité de chaque élément optique. L'appareil de contrôle comprend en outre une carte-mère (22) qui accueille des capteurs thermiques et comporte des connecteurs électriques (23) raccordés auxdits capteurs thermiques.
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Designated States: AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, CA, CH, CN, CU, CZ, DE, DK, EE, ES, FI, GB, GE, GH, GM, GW, HU, ID, IL, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MD, MG, MK, MN, MW, MX, NO, NZ, PL, PT, RO, RU, SD, SE, SG, SI, SK, SL, TJ, TM, TR, TT, UA, UG, US, UZ, VN, YU, ZW
African Regional Intellectual Property Organization (ARIPO) (GH, GM, KE, LS, MW, SD, SZ, UG, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
EP0983492AU1998073814