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1. (WO1998053236) LOW-POWER THERMOPNEUMATIC MICROVALVE

Pub. No.:    WO/1998/053236    International Application No.:    PCT/US1998/010410
Publication Date: Fri Nov 27 00:59:59 CET 1998 International Filing Date: Thu May 21 01:59:59 CEST 1998
IPC: F15C 5/00
F16K 31/00
F16K 31/126
F25B 41/06
Applicants: REDWOOD MICROSYSTEMS, INC.
Inventors: HENNING, Albert, Karl
ZDEBLICK, Mark
FITCH, John, Stuart
HOPKINS, Dean, Allyn, Jr.
LILLY, Leslie, Joe
Title: LOW-POWER THERMOPNEUMATIC MICROVALVE
Abstract:
A thermopneumatic valve comprises a fluid channel plate (30) defining a fluid port. A diaphragm plate (28) is attached to the fluid channel plate. The diaphragm plate includes a displaceable diaphragm (44) to selectively obstruct the fluid port of the fluid channel plate. A thermal isolating heater (22) is connected to the diaphragm plate. The thermal isolating heater includes a thermal isolating heater body with a heating surface, a perimeter wall defining an extended axial cavity to confine a thermopneumatic working fluid (40) that is used to control the position of the displaceable diaphragm and a diaphragm obstruction structure (46) to limit the motion of the displaceable diaphragm into the extended axial cavity.