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1. (WO1998052259) COMPACT EXCIMER LASER INSULATOR WITH INTEGRAL PRE-IONIZER
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/1998/052259 International Application No.: PCT/US1998/006688
Publication Date: 19.11.1998 International Filing Date: 03.04.1998
Chapter 2 Demand Filed: 01.12.1998
IPC:
H01S 3/038 (2006.01) ,H01S 3/0971 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
S
DEVICES USING STIMULATED EMISSION
3
Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves
02
Constructional details
03
of gas laser discharge tubes
038
Electrodes, e.g. special shape, configuration or composition
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
S
DEVICES USING STIMULATED EMISSION
3
Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves
09
Processes or apparatus for excitation, e.g. pumping
097
by gas discharge of a gas laser
0971
transversely excited
Applicants:
CYMER, INC. [US/US]; 16750 Via Del Campo Court San Diego, CA 92127-1712, US (AL, AM, AT, AU, AZ, BA, BB, BE, BF, BG, BJ, BR, BY, CA, CF, CG, CH, CI, CM, CN, CU, CY, CZ, DE, DK, EE, ES, FI, FR, GA, GB, GE, GH, GM, GN, GR, GW, HU, ID, IE, IL, IS, IT, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MC, MD, MG, MK, ML, MN, MR, MW, MX, NE, NL, NO, NZ, PL, PT, RO, RU, SD, SE, SG, SI, SK, SL, SN, SZ, TD, TG, TJ, TM, TR, TT, UA, UG, UZ, VN, YU, ZW)
WATSON, Tom, Arthur [US/US]; US (UsOnly)
PARTLO, William, Norman [US/US]; US (UsOnly)
Inventors:
WATSON, Tom, Arthur; US
PARTLO, William, Norman; US
Agent:
ROSS, John, R.; Cymer, Inc. Legal Dept., MS 1-2A 16750 Via Del Campo Court San Diego, CA 92127-1712, US
Priority Data:
08/857,39516.05.1997US
Title (EN) COMPACT EXCIMER LASER INSULATOR WITH INTEGRAL PRE-IONIZER
(FR) ISOLATEUR COMPACT DE LASER A EXCIMERE A PREIONISEUR INTEGRE
Abstract:
(EN) A pre-ionizing system in which the pre-ionizer elements are integral with the cathode insulating plate (501) is provided. The cathode insulating plate (501) includes a recessed region machined into the front surface into which the cathode (106) fits, lying substantially flush with the insulator front surface. The back surface of the insulating plate (501) contains a pair of slots running parallel to the long axis of the cathode (106). The pre-ionizing rods (305) are located within these slots, the slots having sufficient depth to locate the rods (305) approximately adjacent to the cathode (106). By maintaining the rods at ground, a capacitor is formed in which the insulating plate (501) material between the rod (305) and the cathode (106) acts as the dielectric material of the capacitor. When a voltage pulse is applied, a capactive corona discharge is formed which pre-ionizes the gases in the region near the electrode.
(FR) L'invention porte sur un système de préionisation dans lequel les éléments de préionisation sont partie intégrante de la plaque d'isolation de la cathode (501). Ladite plaque (501) comporte un évidement usiné dans sa surface frontale où vient se loger la cathode (106), qui affleure sensiblement à la surface frontale de la plaque (501). La surface dorsale de la plaque isolante (501) comporte une paire de fentes parallèles à l'axe longitudinal de la cathode (106). Les barreaux de préionisation (305) sont disposés dans ces fentes dont la profondeur est suffisante pour qu'ils (305) soient quasiment contigus à la cathode (106). En mettant les barreaux à la terre, on forme un condensateur dans lequel le matériel des plaques isolantes compris entre les barreaux et la cathode (106) constitue le diélectrique du condensateur. Lors de l'application d'une impulsion de tension, se forme une décharge corona capacitive qui préionise les gaz dans la zone voisine de l'électrode.
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Designated States: AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, CA, CH, CN, CU, CZ, DE, DK, EE, ES, FI, GB, GE, GH, GM, GW, HU, ID, IL, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MD, MG, MK, MN, MW, MX, NO, NZ, PL, PT, RO, RU, SD, SE, SG, SI, SK, SL, TJ, TM, TR, TT, UA, UG, US, UZ, VN, YU, ZW
African Regional Intellectual Property Organization (ARIPO) (GH, GM, KE, LS, MW, SD, SZ, UG, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
KR1020010012603EP0981845AU1998068836