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1. (WO1998052206) PLASMA DISCHARGE EMITTER DEVICE AND ARRAY AND A METHOD OF FABRICATING SAME
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/1998/052206 International Application No.: PCT/US1998/010152
Publication Date: 19.11.1998 International Filing Date: 18.05.1998
Chapter 2 Demand Filed: 10.12.1998
IPC:
B41J 2/395 (2006.01) ,H01J 37/32 (2006.01)
B PERFORMING OPERATIONS; TRANSPORTING
41
PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
J
TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
2
Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
385
characterised by selective supply of electric current or selective application of magnetism to a printing or impression-transfer material
39
using multi-stylus heads
395
Structure of multi-stylus heads
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32
Gas-filled discharge tubes
Applicants:
SARNOFF CORPORATION [US/US]; 201 Washington Road, CN 5300 Princeton, NJ 08543-5300, US
Inventors:
PLETCHER, Timothy, A.; US
PATEL, Vipulkumar, K.; US
AMANTEA, Robert; US
Agent:
BURKE, William, J. ; Sarnoff Corporation 201 Washington Road, CN 5300 Princeton, NJ 08543-5300, US
Priority Data:
08/912,65818.08.1997US
60/046,66216.05.1997US
Title (EN) PLASMA DISCHARGE EMITTER DEVICE AND ARRAY AND A METHOD OF FABRICATING SAME
(FR) DISPOSITIF EMETTEUR A DECHARGE DANS UN PLASMA, GROUPEMENT DE TELS DISPOSITIFS, ET PROCEDE DE FABRICATION DE CE DISPOSITIF
Abstract:
(EN) An inexpensive, robust plasma discharge emitter that repeatably creates a patterned charge on a substrate (122). To facilitate highly accurate charge deposition, each emitter (100) contains a plasma well (114) for confining the plasma within the emitter (100). Additionally, a plurality of emitters are arranged in an array to provide a practical charge patterning device. Furthermore, to fabricate an emitter or an array of emitters, a relatively low-cost, repeatable method of fabrication is used that relies upon conventional integrated circuit fabrication techniques.
(FR) La présente invention concerne un émetteur à décharge dans un plasma, robuste et peu coûteux, créant de manière répétée, une charge à reliefs sur un substrat. Pour faciliter un dépôt de charge très précis, chaque émetteur contient un puits de plasma destiné à confiner le plasma dans l'émetteur. Une pluralité d'émetteurs est, en outre, disposée en un groupement, de manière à constituer un dispositif pratique pour la formation de reliefs de charges. Pour fabriquer un émetteur ou un groupement d'émetteurs, on utilise un procédé de fabrication reproductible et relativement peu coûteux qui repose sur des techniques classiques de fabrication de circuits intégrés.
Designated States: CA, JP
European Patent Office (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE)
Publication Language: English (EN)
Filing Language: English (EN)