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1. (WO1998051417) METHOD AND APPARATUS FOR MAKING THERMIONIC OXIDE CATHODES
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/1998/051417 International Application No.: PCT/US1998/010045
Publication Date: 19.11.1998 International Filing Date: 15.05.1998
Chapter 2 Demand Filed: 15.12.1998
IPC:
C23C 14/00 (2006.01) ,C23C 14/08 (2006.01) ,C23C 14/32 (2006.01) ,G21K 1/08 (2006.01) ,H01J 9/04 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06
characterised by the coating material
08
Oxides
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
24
Vacuum evaporation
32
by explosion; by evaporation and subsequent ionisation of the vapours
G PHYSICS
21
NUCLEAR PHYSICS; NUCLEAR ENGINEERING
K
TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
1
Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
08
Deviation, concentration, or focusing of the beam by electric or magnetic means
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
9
Apparatus or processes specially adapted for the manufacture of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
02
Manufacture of electrodes or electrode systems
04
of thermionic cathodes
Applicants: THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY[US/US]; Suite 350 900 Welch Road Palo Alto, CA 94304, US
Inventors: CARYOTAKIS, George; US
SCHEITRUM, Glenn; US
BROWN, Ian; US
MONTEIRO, Othon, R.; US
Agent: McFARLANE, Thomas, J.; 426 Lowell Avenue Palo Alto, CA 94301, US
Priority Data:
60/046,73116.05.1997US
Title (EN) METHOD AND APPARATUS FOR MAKING THERMIONIC OXIDE CATHODES
(FR) PROCEDE ET APPAREIL PERMETTANT DE FABRIQUER DES CATHODES A REVETEMENT D'OXYDE THERMO-IONIQUE
Abstract:
(EN) A thermionic cathode and method for making same comprises depositing a thermionic oxide coating on a substrate surface. The coating comprises barium oxide, strontium oxide, or calcium oxide or a combination of these materials. An ion beam having barium, strontium, or calcium ions is directed toward the substrate surface (37). The ions (31) have a kinetic energy sufficient to cause adhesion between the ions and substrate. The substrate surface is exposed to pure oxygen gas. In a particular embodiment, the oxygen has a pressure of about 5 x 10-6 Torr. The oxygen reacts with the deposited ions, forming the thermionic oxide coating. Preferably, the ion beam is generated by a metal vapor vacuum arc plasma gun (19). Also preferably, the ions are accelerated toward the substrate surface with an accelerating bias voltage applied to the substrate by a bias power supply (46) to help the ions adhere to the substrate surface.
(FR) Cathode thermo-ionique et procédé de fabrication de ladite cathode qui consiste à déposer un revêtement d'oxyde thermo-ionique sur une surface de substrat. Le revêtement comporte de l'oxyde de baryum, de l'oxyde de strontium ou de l'oxyde de calcium ou une combinaison desdits oxydes. Un faisceau ionique ayant des ions de barium, de strontium, ou de calcium est dirigé vers la surface (37) du substrat. Les ions (31) possèdent une énergie cinétique suffisante pour provoquer leur adhérence sur le substrat. La surface de substrat est exposée à de l'oxygène pur. Dans un mode de réalisation particulier, l'oxygène présente une pression d'environ 5 x 10-6 torr. L'oxygène réagit avec les ions déposés, formant ainsi le revêtement d'oxyde thermo-ionique. De préférence, le faisceau ionique est généré par un pistolet (19) à plasma à arc sous vide à vapeurs métalliques. De préférence également, les ions sont accélérés vers la surface de substrat à l'aide d'une tension de polarisation d'accélération appliquée sur le substrat par un dispositif d'alimentation (46) en puissance polarisée destiné à aider les ions à adhérer à la surface du substrat.
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Designated States: CA, JP
European Patent Office (EPO) (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE)
Publication Language: English (EN)
Filing Language: English (EN)