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1. (WO1998050599) QUARTZ GLASS COMPONENT FOR A REACTOR HOUSING AND METHOD FOR ITS PRODUCTION AND APPLICATION

Pub. No.:    WO/1998/050599    International Application No.:    PCT/EP1998/002685
Publication Date: Fri Nov 13 00:59:59 CET 1998 International Filing Date: Fri May 08 01:59:59 CEST 1998
IPC: B24C 1/06
C03B 19/09
C03C 11/00
C03C 15/00
C03C 17/00
C03C 17/02
C03C 17/23
Applicants: HERAEUS QUARZGLAS GMBH
HELLMANN, Dietmar
LEIST, Johann
Inventors: HELLMANN, Dietmar
LEIST, Johann
Title: QUARTZ GLASS COMPONENT FOR A REACTOR HOUSING AND METHOD FOR ITS PRODUCTION AND APPLICATION
Abstract:
The invention relates to a traditional, bell-shaped quartz glass component for a reactor chamber of a plasma etching device. This traditional quartz glass component comprises a substrate body made of a first quartz glass quality, and an inner surface facing a reactor interior. This inner surface has an average surface roughness Ra of more than 1 νm in at least one wrinkle area. The invention seeks to obtain a quartz glass component for a reactor housing which produces, as far as possible, no particles in the reactor chamber; whose interior surface, which faces the reactor interior, demonstrates high adhesion for material coatings deposited thereon; and which is particularly long-lasting. To this end, the wrinkle area consists of a bubble layer deposited on the substrate body and made of a second quartz glass quality with open pores. The invention also relates to a simple method for producing a quartz glass component of this kind, which enables the reproducible setting of a given surface roughness. The method comprises the following steps: a blank is moulded from a SiO2-containing grain mix; the blank is partially or completely vitrified by heating to a temperature over 1000 °C; an additional component, which reacts during vitrification on release of a gas, is admixed to the SiO2-containing grain mix in a wrinkle area during moulding of the blank interior surface. As a result of this, a porous bubble layer is produced in the wrinkle area during vitrification.