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1. (WO1998049602) LIGHT ABSORBING POLYMERS
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/1998/049602 International Application No.: PCT/EP1998/002333
Publication Date: 05.11.1998 International Filing Date: 21.04.1998
Chapter 2 Demand Filed: 18.11.1998
IPC:
C08F 8/00 (2006.01) ,C08F 8/30 (2006.01) ,G03F 7/09 (2006.01)
C CHEMISTRY; METALLURGY
08
ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
F
MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
8
Chemical modification by after-treatment
C CHEMISTRY; METALLURGY
08
ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
F
MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
8
Chemical modification by after-treatment
30
Introducing nitrogen atoms or nitrogen-containing groups
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
004
Photosensitive materials
09
characterised by structural details, e.g. supports, auxiliary layers
Applicants:
CLARIANT INTERNATIONAL, LTD. [CH/CH]; Rothausstrasse 61 CH-4132 Muttenz 1, CH
Inventors:
DING, Shuji; US
KHANNA, Dinesh, N.; US
LU, Ping-Hung; US
SHAN, Jianhui; US
DAMMEL, Ralph, R.; US
DURHAM, Dana, L.; US
RAHMAN, M., Dalil; US
MCCULLOCH, Iain; US
Agent:
HÜTTER, Klaus; Clariant GmbH Patente, Marken und Lizenzen Building K801 Room 2027 D-65926 Frankfurt am Main, DE
Priority Data:
08/846,98630.04.1997US
Title (EN) LIGHT ABSORBING POLYMERS
(FR) POLYMERES ABSORBANT LA LUMIERE
Abstract:
(EN) The present invention relates to a novel polymer suitable for use as an antireflective coating or as an additive in photoresist for absorption of reflected light. The novel polymer comprises at least one unit containing a dye that absorbs from about 180 nm to about 450 nm and at least one unit that contains no aromatic functionality. The polymer is soluble in organic solvents, preferably solvents of low toxicity, or it may be soluble in water, which may additionally contain other water miscible organic solvents.
(FR) La présente invention concerne un nouveau polymère pouvant être utilisé comme revêtement antireflet ou comme additif dans un photorésist pour absorber la lumière réfléchie. Ce nouveau polymère comprend au moins une unité contenant un colorant qui absorbe entre environ 180 et environ 450 nm et au moins une unité ne présentant aucune valeur aromatique. Le polymère est soluble dans des solvants organiques, de préférence des solvants de faible toxicité, ou il peut être soluble dans l'eau, qui peuvent contenir également d'autres solvants organiques miscibles à l'eau.
Designated States: CN, JP, KR, SG
European Patent Office (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
KR1020010020357SG67842EP0978015JP2000512336 CN1253638