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1. (WO1998049569) MANIPULATOR WITH EXPANDED RANGE OF MOTION
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/1998/049569 International Application No.: PCT/US1998/008924
Publication Date: 05.11.1998 International Filing Date: 30.04.1998
Chapter 2 Demand Filed: 09.11.1998
IPC:
G01R 1/067 (2006.01)
G PHYSICS
01
MEASURING; TESTING
R
MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
1
Details of instruments or arrangements of the types covered by groups G01R5/-G01R13/122
02
General constructional details
06
Measuring leads; Measuring probes
067
Measuring probes
Applicants:
CREDENCE SYSTEMS CORPORATION [US/US]; 215 Fourier Avenue Fremont, CA 94539, US
Inventors:
KHATER, Nabil; US
BAKER, David, A.; US
Agent:
SMITH-HILL, John; Smith-Hill and Bedell, P.C. 12670 NW Barnes Road Suite 104 Portland, Oregon 97229, US
Priority Data:
08/846,69130.04.1997US
Title (EN) MANIPULATOR WITH EXPANDED RANGE OF MOTION
(FR) MANIPULATEUR A RAYON D'ACTION ACCRU
Abstract:
(EN) A tester includes a manipulator (200) attached to a test head (1) for testing semiconductor devices having a range of motion in mutiple degrees of freedom. Vertical (500) and horizontal (600) bearing assemblies, an expansion joint (400), a swing arm (40), a tumble assembly (700) coupled by a rotary bearing assembly (300) to the swing arm provide for lateral movement of the test head in three dimensions as well as angular movement of the test head in horizontal, tumble or twist rotations.
(FR) L'invention porte sur un appareil d'essai comportant un manipulateur (200) se fixant à une tête d'essai (1) en vue de contrôles sur des dispositifs semi-conducteurs et possédant un rayon d'action à plusieurs degrés de liberté. Des systèmes de paliers verticaux (500) et horizontaux (600), un joint d'extension (400), un bras pivotant (40), et un dispositif de culbutage (700) relié par un palier tournant (300) au bras pivotant permettent des déplacements latéraux de la tête dans trois dimensions et des mouvements angulaires de la tête en tangage et en roulis.
front page image
Designated States: JP, KR
European Patent Office (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
KR1020010012130EP0979415JP2001523343